KLT810-DLM
XY Stages

High performance XY stage (linear motor), travel 400 x 400 mm, rep ± 0.4 µm, load 100 kg, speed 1050 mm/s
KLT810-DLM

Highly Dynamic XY System

The multi-axis system KLT810 is characterized by its excellent process and accuracy values and achieves very high speed and acceleration through the built-in linear motors. It is therefore easy to accelerate heavy loads with high precision on a travel distance of 400 x 400 mm.

 

Based on Preciscion Linear Stages of the PLT Series

This multi-axis system was specially developed for laser material processing. For this purpose, two linear stages of the PLT240 series were combined, which achieve the precision required in laser technology and have a long lifetime.
 

Suitable for Industrial Applications

The KLT810 has a sturdy and dustproof housing, making it ideal for use in industrial environments. Optionally, this high-precision multi-axis system can also be prepared with sealing air.

 

KLT810   -400-DLM
Standard System   PLT240-DLM
Travel [mm] 400
Repeatability unidirectional [μm] ± 0.3
Repeatability bidirectional [μm] ± 0.4
Positioning speed [mm/s] 700
Max. speed [mm/s] 1050
Max. acceleration [m/s2] 14
Max. load Fx [N] 150
Max. load Fy [N] 150
Max. load Fz [N] 1010
Length (without granite) [mm] 810
Width (without granite) [mm] 810
Height (without granite) [mm] 206
Weight [kg] 70
Bearing   Profile Rail
Motor   Iron Core Dynamic Linear Motor
Feedback   Linear Scale
Resolution Measuring system 0.1 µm, optionally up to 0.001 µm
Material   Anodized Aluminum
Optional features   base plate (granite / aluminum), housing, prepared with sealing air, break, custom adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants Magnetism magnetic
Variants vacuum    on request

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 


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