KT106/170
Vacuum / Cleanroom XY stages

782445:002.26
KT106/170 - Vacuum / Cleanroom XY stages

 

XY Sample Stage

HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vakuum: all ranges HV up to10-7 mbar
  • Lubrication: liquid up to 10-7 mbar
  • Max. Bakeout temperature: 100°C
  • Optimized price-performance ratio
Options:
  • Can be combined with rotary stages (e.g. DT105)
  • Version for clean room, laboratory or production
  • Customer-specific development with 3D design, prototypes, series production
  • Optionally with FMC400/450 motion controller


Fields of application

Positioning for semiconductor technology, micro- or nanofabrication, mass spectrometer, photoelectron spectrometers, laboratory applications, microscopy, research in high vacuum, sample preparation, sample scanning, sample handling, wafer inspection, material research, material analysis

 

KT106/170   -136/-170-SM-HV  
Travel [mm] 136 x 170  
Repeatability unidirectional [μm] ± 0.6  
Repeatability bidirectional [μm] ± 0.9  
Positioning speed [mm/s] 10  
Max. speed [mm/s] 20  
Max. load Fx [N] 49  
Max. load Fy [N] 49  
Max. load Fz [N] 79  
Length [mm] 310  
Width [mm] 310  
Height [mm] 75  
Weight [kg] 5  
Lubrication liquid [mbar] up to 10-7  
Max. Bakeout temperature [deg] 100  
Motor   Stepper Motor   
Spindle type   1214.532/2.8.203.250BR T5P / 181180  
Spindle lead   2  
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic  
Resolution Measuring system Open Loop  
Optional features   Available with high-resolution measuring system, break , custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs  
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)  
Variants Magnetism magnetic  
Variants vacuum    all ranges up to 10E-7 mbar HV  

 

Used Standard Components

KGT 1214

Cylindrical nut with 4-point-contact and internal ball return

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail