KDT70-PM
Vacuum / Cleanroom XY stages

782440:006.24, 782440:011.26
KDT70-PM - Vacuum / Cleanroom XY stages

 

Non-magnetic titanium XY stage

UHV / DUV / EUV, ISO 6, travel 10 x 10 mm, rep 0.3 µm, load 0.3 kg, speed 10 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all HV / UHV / EUV ranges up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bake-out temperature: 120°C
  • Outstanding stable and magnet-free
  • Extra temperature and corrosion resistant with titanium surfaces
Optional:
  • With and without aperture
  • Available in magnetic, low-magnetic and magnet-free versions
  • Combinable with the XYZ positioning system
  • Optional with FMC400/450 controller
  • Customized development with 3D design, prototypes, series production

Fields of application

Precision positioning for laboratory applications, membrane-integrated microfluidics, organ-on-a-chip applications, acquisition, fixation, alignment, assembly of multiwell plates and membrane chips, research in ultra-high vacuum and under extreme ultraviolet beams, sample preparation, sample scanning, sample handling, biochips

 

KDT70   -10-PM
Travel [mm] 10 x 10
Repeatability unidirectional [μm] ± 0.3
Repeatability bidirectional [μm] ± 0.4
Positioning speed [mm/s] 5
Max. speed [mm/s] 10
Max. load Fx [N] 5
Max. load Fy [N] 5
Max. load Fz [N] 30
Length [mm] 83
Width [mm] 83
Height [mm] 25
Aperture [mm] Ø 30
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Nanomotion
Bearing   cross roller bearings
Feedback   Linear Scale
Resolution measuring system   0.1 µm, optional 0.001 µm / without measuring system
Material   Titanium, aluminum
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail