KDT300
Vacuum / Cleanroom XY stages

782475:002.26
KDT300 - Vacuum / Cleanroom XY stages

 

Heavy load xy scanning stage

UHV, DUV / EUV, cleanroom ISO 4, travel 10 - 100 mm, rep 0.7 µm, 30 kg load

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Aperture: 80 x 80 mm
Optionally configurable:
  • With and without measuring system
  • Optionally with lead screw drive or lubricated ball screw drive for higher speeds
  • Can be combined with rotary stages (e.g. DT155) for rotary applications
  • Material selection and lubrication adapted to the application
  • Configuration for clean room, laboratory or production
  • Customized development with 3D design, prototypes, series production
  • Optionally with controller FMC400/450

Highest stability in the nanometer range, even in dry operation

The positioning system with aperture for transmitted light has been combined from two LT300 linear stages to form a precise and heavy-duty XY stage for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. The system runs completely lubricant-free. Its concept of crossed roller guides and lead screw enables enormously high stability in the nanometer range. Optionally, this system can be designed with lubricated ball screw drives for higher speeds.

Fields of application

Precision positioning of heavy loads, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, camera alignment, materials research, materials analysis, beamline, accelerator, synchrotron

 

KDT300   -10-SM -10-SM-L -50-SM -50-SM-L -100-SM -100-SM-L
Standard System   LT300 LT300 LT300 LT300 LT300 LT300
Travel [mm] 10 x 10 10 x 10 50 x 50 50 x 50 100 x 100 100 x 100
Repeatability unidirectional [μm] ± 2.8 ± 0.7 ± 2.9 ± 0.4 ± 2.9 ± 0.4
Repeatability bidirectional [μm] ± 4 ± 0.5 ± 4 ± 0.5 ± 4 ± 0.5
Positioning speed [mm/s] 5 5 5 5 5 5
Max. speed [mm/s] 10 10 10 10 10 10
Max. load Fx [N] 44 44 44 44 44 44
Max. load Fy [N] 44 44 44 44 44 44
Max. load Fz [N] 120 120 120 120 120 120
Length [mm] 370 370 360 360 340 340
Width [mm] 330 330 300 300 300 300
Height [mm] 120 120 120 120 120 120
Aperture [mm] 80 x 80
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop Linear Scale Open Loop Linear Scale Open Loop Linear Scale
Resolution Measuring system   0.1 µm   0.1 µm   0.1 µm
Optional features   lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail