KDT120
Vacuum / Cleanroom XY stages

782433:006.26
KDT120 - Vacuum / Cleanroom XY stages

 

High-resolution titanium XY Scanning Stage

UHV, DUV / EUV, ISO 4, Travel 24 x 24 mm, Aperture 62 x 62 mm, Rep 0.03 µm, Load 0.5 kg, Speed 3 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: alle ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Very high repeatability up to 50 nanometers
  • Particularly temperature and corrosion resistant by titanium surfaces
Options:
  • With and without aperture
  • Available in magnetic, low-magnetic and magnet-free versions
  • Can be combined to a XYZ positioning system
  • Optionally with FMC400/450 controller
  • Customized development with 3D design, prototypes, series production

Fields of application

Precision positioning for laboratory applications, membrane-integrated microfluidics, organ-on-a-chip applications, mounting, fixing, alignment, assembly of multi-well plates and membrane chips, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips

 

KDT120   -24-PM-L  
Travel [mm]  24 x 24  
Repeatability unidirectional [µm] ± 0.03  
Repeatability bidirectional [µm] ± 0.05  
Positioning speed [mm/s] 2.5  
Max. speed [mm/s] 3.75  
Max. load Fx [N] 5  
Max. load Fy [N] 5  
Max. load Fz [N] 45  
Length [mm] 155  
Width [mm] 120  
Height [mm] 25  
Aperture [mm] 62 x 62  
Lubrication liquid [mbar] up to 10-8  
Lubrication dry [mbar] up to 10-11  
Max. Bakeout temperature [deg] 120  
Motor   Piezo Motor  
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback   Linear Scale  
Resolution Measuring system 0.1 µm, optional up to 0.005 µm   
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs  
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail