KDT105
Vacuum / Cleanroom XY stages

782325:029.26
KDT105 - Vacuum / Cleanroom XY stages

 

High resolution XY scanning stage

HV / UHV / EUV, 50 mm travel, 40 mm aperture, 0.3 µm repeatability, 3 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
  • Clean room class 4 ISO 14644-1 (up to class 1 on request)

Optionally configurable:

  • With and without aperture
  • Available as magnetic, low-magnetic and magnet-free versions
  • Different motor variants: Nanomotion or piezo motor
  • Combinable with XYZ positioning system (e.g. MT105)
  • Combinable with rotary stages (e.g. DT105) for rotary applications
  • Optional with controller FMC400/450

Flexible XY stage with aperture

The XY stage with aperture and cross roller bearings offers high dynamics and speed for applications in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Compared to its size, it enables very small step sizes. Equipped with a piezo motor, it achieves the smallest steps in the nanometer range with an almost unattainable position stability. With a nanomotion, it achieves very high dynamics as well as high speeds and has a maximum service life with precision in the micrometer range.

It can be easily combined with the MT105 lifting stage, thus offering many application possibilities.

Fields of application

Precision positioning for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips, wafer inspection, wafer alignment, camera adjustment, materials research, materials analysis, beamline, accelerator, synchrotron

 

KDT105   -50-PM-L -50-LM-L  
Travel [mm] 50 x 50 50 x 50  
Repeatability unidirectional [μm] ± 0.3 ± 0.5  
Repeatability bidirectional [μm] ± 0.4 ± 0.7  
Positioning speed [mm/s] 5 25  
Max. speed [mm/s] 10 50  
Max. load Fx [N] 5 4  
Max. load Fy [N] 5 4  
Max. load Fz [N] 45 45  
Length [mm] 150 0  
Width [mm] 150 0  
Height [mm] 50 0  
Aperture [mm] 40 x 40    
Lubrication liquid [mbar] up to 10-8    
Lubrication dry [mbar] up to 10-11    
Max. Bakeout temperature [deg] 120  
Motor   Piezo Motor Nanomotion  
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic  
Feedback   Linear Scale  
Resolution Measuring system 0.1 µm, optional 0.001 µm   
Optional features   With or without aperture, DT105 rotary stage, HT160 / MT105 Z-axis, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs  
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)  
Variants Magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail