Vacuum / Cleanroom XY stages
Our high-precision XY Stages are universally applicable and, with their drainage values, for cleanroom ISO 6 and residual pressures of up to 10-6mbar - or even better, meet the special requirements in research, development and modern semiconductor technology.
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Elger Matthes
Development, Consulting, Concepts, Innovation
| T +49 (0) 351 88585-82 |
Ronald Schulze
Consulting, Project Management & Engineering
| T +49 (0) 351 88585-67 |