Vacuum / Cleanroom XY stages

Our high-precision XY Stages are universally applicable and, with their drainage values, for cleanroom ISO 6 and residual pressures of up to 10^-6mbar - or even better, meet the special requirements in research, development and modern semiconductor technology.

KDT310-SM-HV

KDT310-SM-HV

Heavy load XY scanning stage HV, DUV, Cleanroom ISO 6, 100 mm travel, travel 100 x 100 mm, rep up to 0.7 µm,...

KDT300

KDT300

Heavy load xy scanning stage UHV, DUV / EUV, cleanroom ISO 4, travel 10 - 100 mm, rep 0.7 µm, 30 kg load ...

KDT120

KDT120

High-resolution titanium XY Scanning Stage UHV, DUV / EUV, ISO 4, Travel 24 x 24 mm, Aperture 62 x 62 mm,...

KT106/170

KT106/170

XY Sample Stage HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s ...

KDT105

KDT105

High resolution XY scanning stage HV / UHV / EUV, 50 mm travel, 40 mm aperture, 0.3 µm repeatability, 3 kg...

KT105

KT105

High resolution XY stage HV / UHV / EUV, 50 mm travel, 0.3 µm repeatability, 3 kg load Vacuum:...

KDT70-PM

KDT70-PM

Non-magnetic titanium XY stage UHV / DUV / EUV, ISO 6, travel 10 x 10 mm, rep 0.3 µm, load 0.3 kg, speed 10...

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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