MP53-3-PM
Vacuum / Cleanroom compact multi axes systems & aligner

Art. ID 212382

High resolution micropositioner

HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load

Vacuum: all ranges HV / UHV / EUV

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Optionally configurable:

Available as magnetic, low-magnetic and magnet-free version
Optionally with high-resolution measuring system for repeatability up to 0.005 µm
Combinable with rotary stages for rotary applications
Individual adaptation to the installation situation in the chamber
Versions for clean room ISO 14644-1 (up to class 1 on request)
Optional with Controller FMC400/450

Miniaturized XYZ manipulator for demanding applications

The MP53 manipulator is a miniaturized 3-axis system for X, Y and Z motion in very limited installation space. Travel ranges of 10 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum.

Application areas

Precision positioning on smallest installation space for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scan, sample handling, camera adjustment, sensor adjustment, material research, material analysis, beamline, accelerator, synchrotron, miniaturization

Specifications

MP-53-3			-10-PM-L
Travel	[mm]		10
Repeatability unidirectional	[µm]		± 0.2
Repeatability bidirectional	[µm]		± 0.3
Positioning speed	[mm/s]		5
Max. load F_x	[N]		5
Max. load F_y	[N]		5
Max. load F_z	[N]		5
Motor				Piezo Motor
Feedback			Linear Scale
Guide		Cross roller Stainless steel, hybrid, optional full ceramic
Length	[mm]	90
Width	[mm]	55
Height	[mm]	60
Vacuum	[mbar]	up to 10^-11HV/UHV/EUV
Lubrication liquic	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. bakeout temperature	[deg]	120
Magnetism Variants		magnetic \| low-magnetic \| magnet-free

Controllers

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

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201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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