MP105-3
Vacuum / Cleanroom compact multi axes systems & aligner

782300:206.26

Fast, precise micropositioner

HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load

Vacuum: all ranges HV / UHV / EUV

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Optionally configurable:

Available as magnetic, low-magnetic and magnet-free versions
Different motor variants: Piezo motor or nanomotion
Optionally with high-resolution measuring system for repeatability up to 0.005 µm
Can be combined with rotary tables for rotary applications
Individual adaptation to the installation situation in the chamber
Version for clean room ISO 14644-1 (up to class 1 on request)
Optionally with controller FMC400/450

Miniaturized XYZ manipulator for high precision or dynamic applications

The manipulator is a highly dynamic 3-axis system for X, Y and Z movement in very limited installation space. Strokes up to 50 mm are realized. The manipulator is equipped with piezo motors and can thus realize positioning increments of a few nanometers for high-precision applications in high vacuum and ultra-high vacuum. Optionally equipped with a nanomotion, it is particularly suitable for highly dynamic and high-precision positioning.

Application areas

Precision positioning in very small spaces for laboratory applications, microscopy and semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera adjustment, sensor adjustment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization

Specifications

MP105-3		-50-50-50-PM-L	-50-50-20-2PM-L	-50-50-50-LM-L	-50-50-20-2LM-L
Travel X	[mm]	50	50	50	50
Travel Y	[mm]	50	50	50	50
Travel Z	[mm]	50	20	50	20
Repeatability unidirectional	[µm]	± 0.2	± 0.2	± 0.4	± 0.4
Repeatability bidirectional	[µm]	± 0.3	± 0.3	± 0.5	± 0.5
Positioning speed	[mm/s]	5	5	50	20
Max. load Fx	[N]	5	5	5	5
Max. load Fy	[N]	5	5	5	5
Max. load Fz	[N]	5	10	5	10
Feedback		Linear Scale	Linear Scale	Linear Scale	Linear Scale
Motor		Piezo Motor	Piezo Motor	Nanomotion	Nanomotion
Guide		Cross roller Stainless steel, hybrid, optional full ceramic
Length	[mm]	155
Width	[mm]	155
Height	[mm]	195
Vacuum	[mbar]	up to 10^-11HV/UHV/EUV
Lubrication liquic	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. bakeout temperature	[deg]	120
Magnetism Variants		magnetic \| low-magnetic \| magnet-free

Controllers

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants