Vacuum / Cleanroom compact multi axes systems & aligner

The axes shown here are standard systems which are frequently used by customers and are tried and tested solutions. Please get in touch if the length you require is not available. Other levels of precision or loads can also be achieved by selecting the right combination of drives and measuring systems.

MP53-3-PM

High resolution micropositioner HV / UHV / EUV, 10 mm travel, 0.2 µm repeatability, 0.5 kg load ...

MP105-3

Fast, precise micropositioner HV / UHV / EUV, 20 - 50 mm travel, 0.2 µm repeatability, 1 kg load ...

Customize system

Angepasstes System für Ihr Gesamtkonzept

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Your customized system

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82

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Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67

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