DT65
Vacuum / Cleanroom rotary stages

782326:011.24
DT65 - Vacuum / Cleanroom rotary stages

 

Highly dynamic rotary stage

HV / UHV, DUV, Cleanroom ISO 6, unlimited travel, rep up to 0.003°, speed up to 540°/s, load up to 1 kg

  • Clean room: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication: liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Magnetic and low magnetic variants available
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Small, highly dynamic rotary stage

The smallest vacuum rotation stage in the product portfolio impresses with its high dynamics and speed. In vacuum and low-magnetic design, the DT65 is perfectly suited for applications in demanding environments. It is therefore used in particular in research and development as well as in experimental physics. It can be combined into demanding multi-axis systems and can be easily controlled via our FMC 400/450 controllers.
 

Fields of application

Research and development, setup of multi-axis systems, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research

 

DT65   -1NM-W
Travel [deg] nx360
Repeatability unidirectional [deg] ± 0.003
Repeatability bidirectional [deg] ± 0.006
Positioning speed [deg/s] 360
Max. speed [deg/s] 540
Max. acceleration [deg/s2] 20000
Max. load Fz [N] 10
Max. torque Mx [Nm] 3.3
Max. torque My [Nm] 3.3
Max. torque Mz [Nm] 0.25
Length [mm] 106
Width [mm] 65
Height [mm] 30
Turntable [mm] Ø 65
Aperture (optional) [mm] Ø 14
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 100
Bearing   2 Thin-section bearings
Motor   Nanomotion (Piezo)
Feedback   Angular Scale
Resolution Measuring system   0.001 deg 
Optional features   With or without aperture, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom    up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism   magnetic, low-magnetic (magnet-free on request)
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV (higher in request)

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail