DT230-SM
Vacuum / Cleanroom rotary stages

782475:012.14 (DT230-SM)
DT230-SM - Vacuum / Cleanroom rotary stages

 

High-resolution, stable aperture rotary stage

UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0002°, speed 180°/s, load 15 kg

  • Cleanroom: variants up to class ISO 6 (higher on request))
  • Beam: UV, DUV, EUV (X-ray, gamma on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication: liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bake-out temperature: 120°C
Options:
  • Available as magnetic, low-magnetic, magnet-free version
  • Material selection and lubrication adapted to the application
  • Version for cleanroom, laboratory or production
  • Optional with FMC400/450 controller or PLC connection
  • Customer-specific development with 3D design, prototypes, series production


Fields of application

High-resolution, outstanding stable inspection / microscopy, e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, transmitted light measurements in semiconductor technology, wafer inspection, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, materials research, materials analysis

 

DT230   -SM-W
Travel [deg] n x 360
Repeatability unidirectional [deg] ± 0.0002
Repeatability bidirectional [deg] ± 0.0003
Positioning speed [deg/s] 90
Max. speed [deg/s] 180
Max. load Fz [N] 150
Length [mm] 250
Width [mm] 230
Height [mm] 100
Turntable [mm] Ø 200
Aperture (without insert) [mm] Ø 125
Aperture (with insert) [mm] Ø 25
Weight [kg] 13.1
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   Ball Bearing sainless steel, hybrid, optional full ceramic
Feedback   Angular Scale
Resolution Measuring system 0.00002°
Optional features   with / without aperture, high load,  custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail