DT155
Vacuum / Cleanroom rotary stages

782326:034.24
DT155 - Vacuum / Cleanroom rotary stages

 

High-resolution rotary stage with large aperture

UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0003°, speed 300°/s, load 5 kg

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication: liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Available in magnetic and low magnetic versions (magnet-free on request)
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

High precise and dynamic imaging

This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. Due to the large transmitted light of 79 mm / 3", even large samples can be precisely positioned, measured and analyzed. It can be combined into sophisticated multi-axis systems and can be easily controlled via our FMC 400/450 controllers.
 

Fields of application

High precision and dynamic microscopy e.g. electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, beamline instrumentation, synchrotron, materials research, materials analysis, wafer inspection, semiconductor quality control, semiconductor research

 

DT155    -NM
Travel [deg]  n x 360
Repeatability unidirectional [deg] ± 0.0003
Repeatability bidirectional [deg] ± 0.0005
Positioning speed [deg/s] 200
Max. speed [deg/s] 300
Max. load Fx [N] 49
Length [mm] 200
Width [mm] 155
Height [mm] 35
Weight [kg] 1.7
Turntable [mm] Ø 150
Aperture [mm] Ø 79 (3")
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 100
Motor   Nanomotion (Piezo)
Bearing   2 Thin-section bearings, stainless steel
Feedback   Angular Scale
Resolution Measuring system 0.00005°
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom  up to cleanroom class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic, low-magnetic (magnet-free on request)
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail