DT105-NM
Vacuum / Cleanroom rotary stages

782326:024.24, 782326:037.24
DT105-NM - Vacuum / Cleanroom rotary stages

 

High-resolution rotary stage with aperture

HV / UHV, DUV, cleanroom ISO 6, n x 360°, rep 0.0005°, 3 kg load, speed 270°/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / special configuration dry up to 10-11 mbar
  • Max. Bakeout temperature: 100°C
Optionally configurable:
  • Available in magnetic and low magnetic versions (magnet-free as a special configuration)
  • Material selection and lubrication adapted to the application
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

High-resolution imaging under limited installation space

This compact and flat rotary stage achieves extremely high resolutions in vacuum during fast processes. The 36 mm transmitted light allows precise positioning, measurement and analysis of small samples. It can be combined into demanding multi-axis systems and is easily controlled by our FMC 400/450 controllers.
 

Fields of application

High precision and dynamic microscopy e.g. AFM, electron microscope, ion microscope, scanning electron microscope, scanning tunneling microscope, laboratory microscopy, imaging systems, sample analysis, beamline instrumentation, synchrotron, material research, material analysis

 

DT105   -1NM-W -2NM-W
Travel [mm] n x 360 n x 360
Repeatability unidirectional [μm] ± 0.0005 ± 0.0005
Repeatability bidirectional [μm] ± 0.001 ± 0.001
Positioning speed [mm/s] 180 180
Max. speed [mm/s] 270 270
Max. load Fz [N] 10 30
Max. load torque Mz [Nm] 0.4 0.8
Length [mm] 150 150
Width [mm] 105 105
Height [mm] 32 32
Weight [kg] 1.3 1.3
Turntable [mm] Ø 150 Ø 150
Aperture [mm] Ø 36 Ø 36
Lubrication liquid [mbar] up to 10-8 up to 10-8
Lubrication dry (Special configuration) [mbar] up to 10-11 up to 10-11
Max. Bakeout temperature [deg] 100 100
Motor   1 Nanomotion (Piezo) 2 Nanomotion (Piezo)
Bearing   stainless steel
Feedback   angular scale
Resolution Measuring system 0.00005° 
Optional features   Four-point contact ball bearings for liquid lube, equipment with up to 4 motors for higher loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism magnetic, low-magnetic (magnet-free on request)
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail