Vacuum / Cleanroom rotary stages

Rotary stages can position specimens and components exactly at a defined angle. For this purpose, depending on the application, they are equipped with an optimal drive and measuring system for cleanroom ISO 6, residual pressures up to 10^-6mbar - or even better. Our rotary stages were developed to match our linear, micro and lifting stages.

DT310

DT310

Flat aperture rotary stage HV, DUV / EUV, cleanroom ISO 5, n x 360°, rep 0.004°, speed 59°/s, Load 12 kg ...

DT65

DT65

Highly dynamic rotary stage HV / UHV, DUV, Cleanroom ISO 6, unlimited travel, rep up to 0.003°, speed up to...

DT105-NM

DT105-NM

High-resolution rotary stage with aperture HV / UHV, DUV, cleanroom ISO 6, n x 360°, rep 0.0005°, 3 kg load,...

DT155

DT155

High-resolution rotary stage with large aperture UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0003°,...

DT230-SM

DT230-SM

High-resolution, stable aperture rotary stage UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep 0.0002°, speed...

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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