PLT240
Vacuum / Cleanroom linear stages and axes

782354:011.26 (VSS80)
PLT240 - Vacuum / Cleanroom linear stages and axes

 

Precise high-load linear stage

HV / UV / DUV, ISO 6, travel 50 - 850 mm, load 100 kg, rep 0.4 µm, width 240

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all areas in high vacuum, lubrication liquid up to 10-7
  • Max. Bake-out temperature: 80°C
Options
  •  
  • Lead screw with dry lubrication or ball screw with liquid lubrication
  • Design for cleanroom, vacuum and beam
  • Nitrogen atmosphere design
  • Customized development with 3D design, prototypes, series production
  • Optional with FMC400/450 controller


Fields of application

Semiconductor manufacturing & handling, high-load DUV positioning, positioning for scanning applications, transfer positioning, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection

 

PLT240 (VSS80)   -200-SM-L -300-SM-L -400-SM-L -500-SM-L -750-SM-L -850-SM-L
Travel [mm] 200 300 400 500 750 850
Repeatability unidirectional [μm] ± 0.4 ± 0.4 ± 0.4 ± 0.4 ± 0.4 ± 0.4
Repeatability bidirectional [μm] ± 0.5 ± 0.5 ± 0.5 ± 0.5 ± 0.5 ± 0.5
Positioning speed [mm/s] 15 15 15 15 15 15
Max. speed [mm/s] 30 30 30 30 30 30
Max. load Fx [N] 200 200 200 200 200 200
Max. load Fy [N] 1010 1010 1010 1010 1010 1010
Max. load Fz [N] 1010 1010 1010 1010 1010 1010
Width [mm] 240          
Height [mm] 95          
Max. Bakeout temperature [deg] 80          
Lubrication liquid [mbar] up to 10-7          
Drive   Ball Screw 1416/5.20.485.580 R P3P
Screw lead   5
Motor   Stepper Motor
Bearing   Profile Rail
Feedback   Linear Scale
Resolution Measuring system   0.1 µm, optional up to 0.001 µm
Optional features   Repeatability with control on linear scale or open loop for lower accuracy requirements, design for nitrogen atmosphere, lead screw drive with dry lube or ball screw drive with liquid lubrication, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    up to 10E-7 mbar in high vacuum (HV)

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail