MT85-PM
Vacuum / Cleanroom linear stages and axes

782457:006.24
MT85-PM - Vacuum / Cleanroom linear stages and axes

 

Precision miniature linear stage

114 x 97 x 28 mm, UHV / DUV / EUV, ISO 6, travel 25 - 50 mm, rep 0.2 µm, load 1.5 kg, speed 5 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all HV / UHV ranges
  • Beam: UV / DUV / EUV
  • Lubrication: liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bake-out temperature: 140°C
Options:
  • Stackable to a compact 3-axis positioning system
  • Magnetism: magnetic, low-magnet, magnet-free   
  • With up to 2 motors for double load
  • EUV lubrication, flour-free / PFAS-free UHV lubrication
  • Customized development with 3D design, prototypes, series production

Fields of application

Positioning in small dimensions in the EUV cleanroom, e.g. camera, microscope / sensor (AFM, WLI), construction of space-saving XYZ multi-axis systems, manipulator for industry and research, compact cleanroom positioning systems, semiconductor alignment

 

MT85   -2PM-25-L -1PM-50-L
Travel [mm] 25 50
Repeatability unidirectional [μm] ± 0.2 ± 0.2
Repeatability bidirectional [μm] ± 0.3 ± 0.3
Positioning speed [mm/s] 2.5 2.5
Max. speed [mm/s] 5 5
Max. load Fx [N] 12 6
Max. load Fy [N] 15 15
Max. load Fz [N] 15 15
Length [mm] 114  
Width [mm] 97  
Height [mm] 28  
Weight [mm] 0.6  
Lubrication liquid [mbar] up to 10-8  
Lubrication dry [mbar] up to 10-11  
Max. Bakeout temperature [deg] 140  
Motor   Piezo Motor
Bearing   full ceramic bearings, optional stainless steel hybrid
Feedback   Linear Scale
Resolution Measuring system   0.005 µm
Optional features   with up to 2 motors for double forces, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism   magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail