MT53
Vacuum / Cleanroom linear stages and axes

782325:013.26

Miniature linear stage

53 x 53 x 20 mm, HV / UHV / DUV / EUV, travel 10 mm, repro 0.2 µm, load 0.8 kg, speed 7.5 mm/s

Vacuum: all Ranges HV / UHV / DUV / EUV

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Options:

Available as magnetic, low magnetic and magnetic-free version
Compact 3-axis positioning system: MP53-3
Can be combined with rotary stages for rotary applications
Version for clean room, vacuum and beam
Optionally with controller FMC400/450

Sub-micrometer increments by piezo motor

The MT53 is equipped with cross roller bearings and a piezo motor, allowing steps in the nanometer range in very limited dimensions. Travel ranges of 10 mm are realized. Accuracies of +- 0.005 µm are possible with an appropriate linear measuring system.

Fields of application

Precision positioning in compact dimensions for laboratory applications, semiconductor technology, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, camera alignment, sensor alignment, materials research, materials analysis, beamline, accelerator, synchrotron, miniaturization

Specifications

MT53		-10-PM-L
Travel	[mm]	10
Repeatability unidirectional	[μm]	± 0.2
Repeatability bidirectional	[μm]	± 0.3
Positioning speed	[mm/s]	5
Max. speed	[mm/s]	7.5
Max. load Fx	[N]	5
Max. load Fy	[N]	8.8
Max. load Fz	[N]	8.8
Length	[mm]	53
Width	[mm]	53
Height	[mm]	20
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Piezo Motor
Bearing		cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback		Linear Scale
Resolution Measuring system		0.1 µm, optionally up to 0.005 µm
Optional features		positioning with very high resolution, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

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