MT130
Vacuum / Cleanroom linear stages and axes

782327:084.26
MT130 - Vacuum / Cleanroom linear stages and axes

 

EUV miniature linear stage

155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3 µm, load 9 kg, speed 40 mm/s

  • Cleanroom: variants up to class ISO 5 (higher on request)
  • Vacuum: all HV / UHV ranges
  • Beam: EUV, DUV, UV
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bake-out temperature: 120°C
Options:
  • Stackable to form a compact 3-axis positioning system: MP130-3
  • Combinable with the DT130 rotary stage
  • Travel range up to 80 mm
  • High-resolution measuring system
  • EUV lubrication, flour-free / PFAS-free UHV lubrication
  • Customized development with 3D design, prototypes, series production

Compact EUV linear axis with internal motor

The miniature linear stage achieves very good running values with backlash-free cross roller bearing. The drive is integrated into the highly compact positioning system. The positioning system is also equipped with a permanent magnetic brake.

Fields of application

Positioning in small dimensions in EUV cleanrooms, e.g. camera, microscope / sensor (AFM, WLI), construction of space-saving XYZ multi-axis systems, aligner for industry and research, compact cleanroom positioning systems, wafer inspection, wafer probe alignment

 

MT130   -50-SM
Travel [mm] 50
Repeatability unidirectional [μm] ± 2.3
Repeatability bidirectional [μm] ± 4.3
Positioning speed [mm/s] 20
Max. speed [mm/s] 40
Max. load Fx [N] 45
Max. load Fy [N] 95
Max. load Fz [N] 95
Length [mm] 155
Width [mm] 130
Height [mm] 43
Weight [kg] 2.2
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Drive   Ball Screw 1214.563/2.8.78.115 P3P (ISO 5)
Lead   2
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
Motor   Stepper Motor
Feedback   Open Loop
Optional features   Travels up to 80 mm, high-resolution linear scale, custom EUV lube or fluorine-free / PFAS-free UHV lubrication, lead screw with dry lube, adapter, bore grid, cable / plugs
Variants cleanroom  up to clean room class ISO 5 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail