MT105
Vacuum / Cleanroom linear stages and axes

782325:142.24, 782325:141.24, 782325:040.24
MT105 - Vacuum / Cleanroom linear stages and axes

 

Customizable micro stage

10^ -11 HV / UHV / EUV, 30 - 100 mm travel, 0.4 µm repeatability, 5 kg load

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C

Optionally configurable:

  • Available as magnetic, low magnetic and magnetic-free version
  • With up to 2 different motors for motion of high loads
  • Different motor variants: Nanomotion, piezo motor or linear motor
  • Combinable with the XYZ positioning system
  • Combinable with rotary tables (e.g. DT105) for rotary applications
  • Individual adaptation to the installation situation in the chamber
  • Version for clean room ISO 14644-1 (up to class 1 on request)
  • Optional with controller FMC400/450

    Flexible and universal for demanding environmental conditions

    The MT105 is a universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ultra-high vacuum and for non-magnetic applications. Optionally, the micro stage can be equipped with two motors to position higher loads.

    Fields of application

    Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, sensor alignment, bioprinting, high-throughput production of three-dimensional cell spheroids

    References

    Bioprinting-Based High-Throughput Fabrication of Three-Dimensional MCF-7 Human Breast Cancer Cellular Spheroids | Engineering (2015) Vol.1 Issue (2): 269-274 | https://www.engineering.org.cn/EN/10.15302/J-ENG-2015062

     

    MT105   -30-2PM-L -50-PM-L -100-PM-L -30-2NM-L -50-LM-L -100-LM-L
    Travel [mm] 30 50 100 30 50 100
    Repeatability unidirectional [μm] ± 0.2 ± 0.2 ± 0.2 ± 0.4 ± 0.4 ± 0.4
    Repeatability bidirectional [μm] ± 0.3 ± 0.3 ± 0.3 ± 0.5 ± 0.5 ± 0.5
    Positioning speed [mm/s] 5 5 5 50 50 50
    Max. speed [mm/s] 7.5 7.5 7.5 75 75 75
    Max. load Fx [N] 10 10 10 4 4 4
    Max. load Fy [N] 55 55 55 55 55 55
    Max. load Fz [N] 55 55 55 55 55 55
    Length [mm] 152
    Width [mm] 105
    Height [mm] 25
    Lubrication liquid [mbar] up to 10-8
    Lubrication dry [mbar] up to 10-11
    Max. Bakeout temperature [deg] 120
    Motor   Piezo Motor Piezo Motor  Piezo Motor  Nanomotion  Nanomotion  Nanomotion 
    Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
    Feedback   Linear Scale
    Resolution Measuring system   0.1 µm, optional 0.005 µm 
    Optional features   With up to 2 different motors for the motion of high loads, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
    Variants clean room    up to clean room class ISO 6 (higher on request)    
    Variants beam   UV, DUV, EUV (X-ray, gamma on request)
    Variants Magnetism   magnetic, low-magnetic, magnet-free
    Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

     

    Angepasstes System für Ihr Gesamtkonzept

    Your customized system

    201/5000 Even more axes for your vacuum applications

    Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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    Elger Matthes
    Development, Consulting, Concepts, Innovation

    T +49 (0) 351 88585-82
    E-Mail

    Ronald Schulze
    Consulting, Project Management & Engineering

    T +49 (0) 351 88585-67
    E-mail