LT300
Vacuum / Cleanroom linear stages and axes

782475:035.26, 782475:006.26

Precise high load linear stage

HV / UHV / EUV, ISO 4, 50 - 100 mm travel, 0.5 µm repeatability, 10 kg load

Cleanroom: variants up to class ISO 4 (higher on request)

Vacuum: all ranges HV / UHV / EUV up to 10^-11 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Clean room class 4 ISO 14644-1 (up to class 1 on request)

Very long lifetime, even with dry running

Optionally configurable:

Available with piezo break
Material selection and vacuum lubrication adapted to the application
Individual adaptation to the installation situation in the chamber
Version for clean room ISO 14644-1 (up to class 1 on request)
Optional with controller FMC400/450

Stability in the nanometer range even high loads up to 10 kg

The linear stage is designed to position loads with high rigidity under extreme conditions, such as in high vacuum and ultra-high vacuum. Equipped with a piezoelectric caliper brake, this positioning system achieves stability in the nanometer range.

Fields of application

Semiconductor technology in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, wafer inspection, camera alignment, sensor alignment, inspection of contacts, alignment of mirrors, probing, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, high-precision scanning applications

Specifications

LT300		-50-SM	-50-SM-L	-100-SM	-100-SM-L
Travel	[mm]	50	50	100	100
Repeatability unidirectional	[μm]	± 2.9	± 0.4	± 2.9	± 0.4
Repeatability bidirectional	[μm]	± 4	± 0.5	± 4	± 0.5
Positioning speed	[mm/s]	5	5	5	5
Max. speed	[mm/s]	10	10	10	10
Max. load Fx	[N]	44	44	44	44
Max. load Fy	[N]	44	44	44	44
Max. load Fz	[N]	120	120	120	120
Length	[mm]	360	360	340	340
Width	[mm]	300	300	300	300
Height	[mm]	65	65	60	60
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Stepper Motor
Bearing		cross roller bearings stainless steel, hybrid
Feedback		Open Loop	Linear Scale	Open Loop	Linear Scale
Resolution Measuring system			0.1 µm		0.1 µm
Optional features		lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

Controllers

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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