LA97
Vacuum / Cleanroom linear stages and axes

782457:005.24

Nanometer linear stage

HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load

Vacuum: all areas HV / UHV up to 10^-11 mbar

Lubrication: liquid up to 10^-8 mbar / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Optionally configurable:

Magnetic, low-magnetic and magnet-free versions available
Material selection and vacuum lubrication adapted to the application
Individual adaptation to the installation situation in the chamber
Version for clean room ISO 14644-1 (up to class 1 on request)
Optional with controller FMC400/450

Horizontal and vertical nanometer positioning

This vacuum linear axis is suitable for all HV / UHV ranges up to 10^-11mbar. It is universally applicable, as it can also be used for vertical positioning tasks. It achieves extremely high resolutions and highest stiffness in vacuum. Depending on the load to be moved, 2 up to 6 motors can be used in pincer arrangement.

Fields of application

High precision scanning applications, micro assembly, semiconductor technology in ultra-high vacuum and under ultraviolet radiation, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection

Specifications

782457:005.24		-100-PM	-200-PM	-300-PM
Travel	[mm]	100	200	300
Repeatability unidirectional	[μm]	± 0.015	± 0.015	± 0.015
Repeatability bidirectional	[μm]	± 0.02	± 0.02	± 0.02
Positioning speed	[mm/s]	5	5	5
Max. speed	[mm/s]	7.5	7.5	7.5
Max. load Fx	[N]	39	68	98
Max. load Fy	[N]	39	68	98
Max. load Fz	[N]	19	39	58
Length	[mm]	120	220	320
Width	[mm]	97	97	97
Height	[mm]	44	44	44
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Piezo Motor
Bearing		cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback		Linear Scale
Resolution Measuring system		0.000005 µm, optionally up to 0.000001 µm
Optional features		custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10^-11 mbar HV / UHV

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

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201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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