LA95
Vacuum / Cleanroom linear stages and axes

782475:055.26 (40); 782475:054.26 (80), 782475:016.26 (185) - with gear box
LA95 - Vacuum / Cleanroom linear stages and axes

 

Precision linear stage

HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg, Speed 8.4 mm/s

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vakuum: all ranges HV / UHV
  • Lubrication liquid up to 10-8 mbar / dry up to 10-9 mbar
  • Max. bakeout temperature: 120°C
Options:
  • With or without measuring system
  • With or without gear box (picture without gear box)
  • Design for clean room, vacuum and radiation
  • Lead screw with dry lub ball screw with liquid lub
  • Combinable with the XYZ system 3LA95 (OSA) or with rotary stages
  • Custom development with 3D design, prototypes, series production
  • Optional with FMC400/450 controller


Fields of application

Positioning for scanning applications, micro-assembly, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection, positioning system for laboratory inspection

 

LA95   -40-SM -40-SM-L -80-SM -80-SM-L -185-SM -185-SM-L
Travel [mm] 40 40 80 80 185 185
Repeatability unidirectional [μm] ± 1.9 ± 0.4 ± 1.9 ± 0.4 ± 1.9 ± 0.4
Repeatability bidirectional [μm] ± 2.9 ± 0.5 ± 2.9 ± 0.5 ± 2.9 ± 0.5
Positioning speed [mm/s] 4.2 4.2 4.2 4.2 4.2 4.2
Max. speed [mm/s] 8.4 8.4 8.4 8.4 8.4 8.4
Max. load Fx [N] 45 45 45 45 45 45
Max. load Fy [N] 40 40 40 40 40 40
Max. load Fz [N] 40 40 40 40 40 40
Length (with gear box) [mm] 260 260 285 285 410 410
Length (without gear box) [mm] 235 235 260 260 385  
Width [mm] 105 105 105 105 95 95
Height [mm] 50 50 50 50 55 55
Weight [kg] 2.6 2.6     4.5 4.5
Max. Bakeout temperature [deg] 120 80 120 80 120 80
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-9
Drive   Lead Screw TR8x1.5
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop Linear Scale Open Loop Linear Scale Open Loop Linear Scale
Resolution Measuring system     0.1 µm, optional up to 0.01 µm   0.1 µm, optional up to 0.01 µm   0.1 µm, optional up to 0.01 µm
Optional features   Gear box, lead screw with dry lube or ball screw with liquid lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room    up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism   magnetic
Variants vacuum    all ranges up to 10E-9 mbar HV / UHV      

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail