LA92
Vacuum / Cleanroom linear stages and axes

782475:037.26, 782475:028.26

High Speed Linear Axis

HV / UHV / EUV, ISO 4, 40 mm travel, 0.4 µm repeatability, up to 2 kg load

Cleanroom: variants up to class ISO 4 (higher on request)

Vacuum: all areas HV / UHV up to 10^-11 mbar

Lubrication liquid up to 10^-8 / dry up to 10^-11 mbar

Max. Bakeout temperature: 120°C

Optionally configurable:

Magnetic, low-magnetic and magnet-free versions available
Material selection and vacuum lubrication adapted to the application
Can be combined to a fast XYZ transfer system (e.g. LA90, LA95, LA170)
Individual adaptation to the installation situation in the chamber
Version for clean room ISO 14644-1 (up to class 1 on request)
Optional with controller FMC400/450

Fast horizontal and vertical positioning in UHV

The linear axis is mainly used for scanning samples. It allows fast positioning with extremely high resolution in ultra-high vacuum, also in vertical direction. It has a very narrow design with internal motors.

Application areas

High resolution and fast scanning applications, micro assembly, semiconductor technology in ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection.

Specifications

LA92		-40-LM-L
Travel	[mm]	40
Repeatability unidirectional	[μm]	± 0.3
Repeatability bidirectional	[μm]	± 0.4
Positioning speed	[mm/s]	100
Max. speed	[mm/s]	150
Max. load Fx	[N]	19
Max. load Fy	[N]	19
Max. load Fz	[N]	9
Length	[mm]	205
Width	[mm]	92
Height	[mm]	32
Lubrication liquid	[mbar]	up to 10^-8
Lubrication dry	[mbar]	up to 10^-11
Max. Bakeout temperature	[deg]	120
Motor		Nanomotion
Bearing		cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback		Linear Scale
Resolution Measuring system		0.1 µm, optionally up to 0.005 µm
Optional features		custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room		up to clean room class ISO 4 (higher on request)
Variants beam		UV, DUV (EUV, X-ray, gamma on request)
Variants Magnetism		magnetic, low-magnetic, magnet-free
Variants vacuum		all ranges up to 10^-11 mbar HV / UHV

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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