LA105
Vacuum / Cleanroom linear stages and axes

782475:036.26 (VSS43, without gear box)
LA105 - Vacuum / Cleanroom linear stages and axes

 

Translation stage with piezo offset

HV / UV / DUV, ISO 3, travel 7 - 100 mm, load 3 kg, rep ± 0.002 µm, width 105 mm

  • Cleanroom: Versions up to class ISO 3 (higher on request)
  • Vacuum: all ranges HV, UHV liquid up to 10-8 / dry up to 10-9 mbar
  • Max. bakeout temperature: 120°C
Options
  • Lead Screw Drive for UHV or Ball Screw in full step motion
  • Gear box for vertical operation
  • Version for cleanroom, vacuum and beam
  • Customized development with 3D design, prototypes, series production
  • Optional with controller FMC400/450

Stability in the pm range, nm step size for up to 100 mm travel range

The base is a system consisting of a lead screw for UHV or a ball screw at full step motion. A piezo mechanism is integrated in the carriage of the stage, which, starting from this very stable base, realizes further positioning motions with sub-µm resolution. The system works on the piggyback principle. For vertical applications, the stage can be equipped with a gear box. For continuous processes, feedback on the piezo drive is not recommended, but can be integrated if desired.


Fields of application

Semiconductor manufacturing & handling, DUV positioning, alignment of optical components, semiconductor inspection, mask aligner, laminography, synchrotron research, positioning for scanning applications, transfer positioning, semiconductor technology, ultra-high vacuum, vacuum chambers, research, beamline instrumentation, electronics assembly and inspection.

 

LA105 (VSS43)   X1 X2 (Offset Stage)
Travel [mm] 7 - 100 0.1
Repeatability unidirectional [μm] ± 7.5 ± 0.001
Repeatability bidirectional [μm] ± 30 ± 0.002
Smallest incremental step [μm] 7.5 0.001
Positioning speed [mm/s] 5 0.1
Max. speed [mm/s] 10 0.15
Max. load Fx [N] 30  
Max. load Fy [N] 30  
Max. load Fz [N] 30  
Length [mm] 210  
Width [mm] 105  
Height [mm] 57  
Weight [kg] 2.5  
Lubrication liquid [mbar] up to 10-8  
Lubrication dry [mbar] up to 10-11  
Max. Bakeout temperature [deg] 120
Screw lead [mm] 1.5  
Screw type   Lead Screw P1.5 D8 L85
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
Motor   Stepper Motor Piezo-Stack
Feedback   Linear Scale Open Loop
    0.1 µm, optionally up to 0.001 µm
Optional features   ball screw with liquid lubrication, gearbox for vertical applications, with / without Offset Stage, linear scale for piezo offset stage, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom  up to clean room class ISO 3 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism magnetic  
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail