HT160
Vacuum / Cleanroom lifting stages

782331:124.26
HT160 - Vacuum / Cleanroom lifting stages

 

Precise vertical lifting stage

UHV, DUV / EUV, cleanroom ISO 4, travel 16 mm, rep 1 µm, load 5 kg

  • Cleanroom: variants up to class ISO 4 (higher on request)
  • Vacuum: all ranges HV / UHV / EUV up to 10-9 mbar
  • Lubrication liquid up to 10-9 / dry up to 10-9 mbar
  • Max. Bakeout temperature: 120°C
Options:
  • Material selection and lubrication adapted to the application
  • Version for cleanroom, vacuum and beam
  • Optional with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads

The lifting stage is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum. Due to its lift-wedge principle, it achieves its parameters despite its low overall height. The combination of gearmotors and a precise ball screw, optional lead screw, enables smallest step sizes at comparatively high loads.
 

Application areas

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, wafer alignment, camera alignment, materials research, materials analysis, microscopy in vacuum, beamline, accelerator, synchrotron

 

782331:124.26   -SM -SM-L
Travel [mm] 16 16
Repeatability unidirectional [μm] ± 1.7 ± 1
Repeatability bidirectional [μm] ± 2.7 ± 2
Positioning speed [mm/s] 1.1 1.1
Max. speed [mm/s] 2.2 2.2
Max. load Fx [N] 50 50
Max. load Fy [N] 50 50
Max. load Fz [N] 45 45
Length [mm] 348 348
Width [mm] 154 154
Height [mm] 58 58
Weight [kg] 5 5
Drive   1214.559/1.8.88.124R P3P
Lubrication liquid [mbar] up to 10-9  
Lubrication dry [mbar] up to 10-9  
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor 
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop  Linear Scale
Resolution Measuring system - 0.1 µm, optional up to 0.001 µm
Optional features   wedge with ball screw or lead screw with dry lube, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 4 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic  
Variants vacuum    all ranges up to 10E-9 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail