HDT255
Vacuum / Cleanroom lifting stages

782475:013.14
HDT255 - Vacuum / Cleanroom lifting stages

 

Aperture lifting stage

UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV up to 10-11 mbar
  • Lubrication liquid up to 10-8 mbar / dry up to 10-11 mbar
  • Max. Bakeout temperature: 120°C
Optionally configurable:
  • With or without aperture
  • Optionally with and without measuring system
  • Material selection and lubrication adapted to the application
  • Optionally with controller FMC400/450
  • Customized development with 3D design, prototypes, series production

Precise lifting stage for high loads

The lifting stage with aperture is suitable for high-precision vertical movements under extreme conditions, such as in high vacuum, ultra-high vacuum and under extreme ultraviolet radiation. Due to its lift-wedge principle, it achieves its parameters despite a low overall height of 125 mm. The combination of stepper motor and a precise ball screw, optionally sliding screw, allows smallest step sizes at comparatively high loads.
Application areas
 

Fields of application

Precision positioning in industry and research in ultra-high vacuum and under extreme ultraviolet radiation, alignment and inspection of wafers, probe cards and printed circuit boards, surface analysis, layer thickness measurement, camera alignment, materials research, materials analysis, inspection, microscopy in vacuum, beamline, accelerator, synchrotron

 

HDT255   -SM -SM-L
Travel [mm] 16 16
Repeatability unidirectional [μm] ± 2.9 ± 0.7
Repeatability bidirectional [μm] ± 4 ± 1
Positioning speed [mm/s] 8.3 8.3
Max. speed [mm/s] 16.6 16.6
Max. load Fx [N] 98 98
Max. load Fy [N] 98 98
Max. load Fz [N] 98 98
Length [mm] 410 410
Width [mm] 225 225
Height [mm] 125 125
Aperture [mm] 60 x 60
Weight [kg] 11
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Stepper Motor
Bearing   cross roller bearings stainless steel, hybrid
Feedback   Open Loop  Linear Scale
Resolution Measuring system - 0.1 µm
Optional features   With or without aperture, lead screw or ball screw, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants cleanroom  up to cleanroom class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism magnetic
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail