Vacuum / Cleanroom lifting stages

Our vacuum lifting stages are used for high precision, vertical positioning for min. cleanroom ISO 6. They are used separately or in combination with linear stages, if probes or components need to be adjusted vertically.

HDT255

HDT255

Aperture lifting stage UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s ...

HT240

HT240

Precise high load vertical lifting stage UHV, DUV / EUV, cleanroom ISO 4, travel 25 mm, rep 0.3 µm, 40 kg...

HT160

HT160

Precise vertical lifting stage UHV, DUV / EUV, cleanroom ISO 4, travel 16 mm, rep 1 µm, load 5 kg ...

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants

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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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