YZ Tracking Stage
Vacuum / Cleanroom Multi Axes Systems

782475:017.26

YZ system with piezo brake (UHV)

This 3-axis system is dry-running, has a piezo brake as well as a lead screw and stepper motor. A measuring system is integrated for feedback of the actual position. The axes, consisting of the standard axes LA95 and LA105, are HV / UHV compatible and designed up to clean room class ISO 6.

Controllers

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

Angepasstes System für Ihr Gesamtkonzept

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants