3LT300
Vacuum / Cleanroom Multi Axes Systems

782475:003.26

XYZ manipulator

Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry running for best possible vacuum compatibility, high bake-out temperature and supers table design due to piezo brakes.

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

Angepasstes System für Ihr Gesamtkonzept

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants