XYZ Beam Aligner
Vacuum / Cleanroom Multi Axes Systems

782300:087.26
XYZ Beam Aligner - Vacuum / Cleanroom Multi Axes Systems

 

UHV / DUV / EUV, cleanroom ISO 6, travel 5 x 10 x 5 mm, rep 0.2 µm, load 0.5 kg

  • Cleanroom: variants up to class ISO 6 (higher on request)
  • Vacuum: all ranges HV / UHV / EUV, lubrication liquid up to 10-8 / dry up to 10-11 mbar
  • Max. bakeout temperature: 120°C
Options:
  • Available as magnetic, low-magnetic and magnet-free version
  • Can be combined with rotary stages for rotational applications
  • Version for cleanroom, vacuum and beam
  • Customer-specific development with 3D design, prototypes, series production
  • Optional with controller

Transfer with sub-micrometer step sizes in the smallest dimensions

This positioning system is based on MT53 stages with piezo-drives. Two of those stages are used for xz-motion. Apart from xz another stage of the same make is situated. This design allows for highly compact positioning of samples under extreme beams in an extremely small dimension.

The MT53 is equipped with cross roller guides and a piezo drive, which enables step sizes in the nanometer range in very limited dimensions. It can achieve a travel range of 10 mm. Repeatability of +- 0.005 µm is possible with the appropriate linear measuring system.

Fields of application

Precision positioning in the smallest dimensions for laboratory applications, research in ultra-high vacuum and under extreme ultraviolet beams, 3-axis beam alignment, sample preparation, sample scanning, sample handling, materials research, materials analysis, synchrotron, miniaturization.

 

782300:087.26   X Y Z
Standard System   MT53-5-PM MT53-10-PM MT53-5-PM
Travel [mm] 5 50 20
Repeatability unidirectional [μm] ± 0.2 ± 0.2 ± 0.2
Repeatability bidirectional [μm] ± 0.3 ± 0.3  ± 0.3
Positioning speed [mm/s] 5 5 5
Max. speed [mm/s] 10 10 10
Max. load Fx [N] 5 5 5
Max. load Fy [N] 8.8 8.8 8.8
Max. load Fz [N] 8.8 8.8 8.8
Length [mm] 195
Width [mm] 75
Height [mm] 70
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to 10-11
Max. Bakeout temperature [deg] 120
Motor   Piezo Motor 
Bearing   cross roller bearings stainless steel, hybrid, optional full ceramic
Feedback   Linear Scale
Resolution Measuring system 0.1 µm, optionally up to 0.005 µm
Optional features   custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV (EUV, X-ray, gamma on request)
Variants magnetism magnetic, low-magnetic, magnet-free
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV

 

Used Standard Components

MT53-PM

Micro stage with cross roller bearings and piezo motor for steps in nanometer range.

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail