EUV adjuster
Vacuum / Cleanroom Multi Axes Systems

782479:001.26

UHV mirror adjuster for Beamline

This UHV positioning unit tilts into the beam by rope pulley driven from outside the vacuum chamber. Thus the mirror system changes linear polarized light into circular polarized light. For control of the circular polarization the mirror unit can be rotated around the beam by means of a steel band pulley.

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

Angepasstes System für Ihr Gesamtkonzept

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201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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