sample manipulator
Vacuum / Cleanroom Multi Axes Systems
782442:001.26
In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator. Capacitive sensors are used for feedback. The pairs of piezo motors are pushing ceramic rods which are part of a systems of spring preloaded rope pulleys. Motion increments of nanometers are achieved. Have fun understanding the system and regards to Dr. Tino Noll!
| 782442:001.26 | X | Y | Z | Rx | Ry | Rz | |
| Travel | [mm] | 5 | 5 | 5 | 2 | 2 | 0.5 |
| Repeatability unidirectional | [μm] | 20 | 20 | 20 | 0.000007 | 0.000007 | 0.000002 |
| Repeatability bidirectional | [μm] | 35 | 35 | 35 | 0.00001 | 0.00001 | 0.00003 |
| Positioning speed | [mm/s] | 1 | 1 | 1 | 1 | 1 | 0.5 |
| Max. speed | [mm/s] | 2 | 2 | 2 | 2 | 2 | 1 |
| Max. load | [N] | 1 | |||||
| Length x width x height | [mm] | 500 x 250 x 300 | |||||
| Weight | [kg] | 7.7 | |||||
| Lubrication liquid | [mbar] | minimum, up to 10-8 | |||||
| Lubrication dry | [mbar] | up to 10-8 | |||||
| Max. Bakeout temperature | [deg] | 80 | |||||
| Drive | Pulley | ||||||
| Motor | Piezo Motor | ||||||
| Feedback | Capacitive Sensor | ||||||
| Variants cleanroom | up to clean room class ISO 6 (higher on request) | ||||||
| Variants beam | UV, DUV, EUV, X-ray (gamma on request) | ||||||
| Variants magnetism | magnetic, low-magnetic, non-magnetic | ||||||
| Variants vacuum | all ranges up to 10E-8 mbar High vacuum (HV) / ultra-high vacuum (UHV) | ||||||
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew cleanroom & vacuum systems Contact technical consultants
Elger Matthes
Development, Consulting, Concepts, Innovation
| T +49 (0) 351 88585-82 |
Ronald Schulze
Consulting, Project Management & Engineering
| T +49 (0) 351 88585-67 |