sample manipulator
Vacuum / Cleanroom Multi Axes Systems

782442:001.26

In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator. Capacitive sensors are used for feedback. The pairs of piezo motors are pushing ceramic rods which are part of a systems of spring preloaded rope pulleys. Motion increments of nanometers are achieved. Have fun understanding the system and regards to Dr. Tino Noll!

Specifications

782442:001.26		X	Y	Z	Rx	Ry	Rz
Travel	[mm]	5	5	5	2	2	0.5
Repeatability unidirectional	[μm]	20	20	20	0.000007	0.000007	0.000002
Repeatability bidirectional	[μm]	35	35	35	0.00001	0.00001	0.00003
Positioning speed	[mm/s]	1	1	1	1	1	0.5
Max. speed	[mm/s]	2	2	2	2	2	1
Max. load	[N]	1
Length x width x height	[mm]	500 x 250 x 300
Weight	[kg]	7.7
Lubrication liquid	[mbar]	minimum, up to 10^-8
Lubrication dry	[mbar]	up to 10^-8
Max. Bakeout temperature	[deg]	80
Drive		Pulley
Motor		Piezo Motor
Feedback		Capacitive Sensor
Variants cleanroom		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV, X-ray (gamma on request)
Variants magnetism		magnetic, low-magnetic, non-magnetic
Variants vacuum		all ranges up to 10E-8 mbar High vacuum (HV) / ultra-high vacuum (UHV)

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

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Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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