sample fixation (non magnetic, UHV)
Vacuum / Cleanroom Multi Axes Systems

782442:002.26

In order to protect the delicate probe in its equally delicate probe holder this probe holder was designed. Here, the 12 piezo motors are driving a ceramic disk which is connected to a double threaded nut acting upon a spindle with diamond like carbon coating. By turning the disk the spindle moves downwards.

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

Angepasstes System für Ihr Gesamtkonzept

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Your customized system

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smallest setting step

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages Contact technical consultants