linear stage with two lifting stages
Vacuum / Cleanroom Multi Axes Systems

A robust PLT240 in vacuum preparation is carrying two lifting stages. All stages are driven by vacuum stepper motors. The lifting stages are of the wedge type with ball screw drive.

Used Standard Components

HT160-SM

Precision vertical lift stage (ball screw), travel 16 mm, rep ± 1.7 µm, load 5 kg, speed 2,2 mm/s

PLT240-DLM

High performance stage (linear motor), travel 200 - 1000 mm, rep 0.4 µm, load 15 kg, speed 1815 mm/s

PLT240-AC

High performance stage (ball screw), travel 200 - 850 mm, rep ± 0.4 µm, load 64 kg, speed 260 mm/s

PLT240-SM

High load linear stage (ball screw), travel 200 - 850 mm, rep ± 3.9 µm, load 42 kg, speed 260 mm/s

HT160-DC

Precision vertical lift stage (ball screw), travel 16 mm, rep ± 0.7 µm, load 5 kg, speed 16.6 mm/s

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201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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