LA97-MT85
Vacuum / Cleanroom Multi Axes Systems

782457:001.26

A three axes magnet free stage system. Strokes are at 200 mm for x and each 10 mm for y and z (vertical). The piezo motors used are a custom design and give the manipulator the ability to move loads of up to 2,5 kg with very high resolution. Outstanding stability in nm range is the main advantage of this system.

Controllers

FMC 250/280

Multi-axis controller with increased current and voltage for point-to-point positioning.

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Customize system

Angepasstes System für Ihr Gesamtkonzept

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201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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