XYZ Transfer Stage
Vacuum / Cleanroom Multi Axes Systems

782475:053.26, 782475:039.26, 782475:001.26
XYZ Transfer Stage - Vacuum / Cleanroom Multi Axes Systems

 

Fast 3-axis UHV system LA80-2LA95

UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load

This fast transfer stage is suitable for precise, fast and long-life applications in ultra-high vacuum. It also meets the requirements for use under extreme ultraviolet radiation due to its very low emission and low particle count. The axes are available in sizes LA80, LA95, LA170 and are designed for loads up to 20 kg in vertical operation. This axis combination was developed as part of the “tOMography Nano crYo (OMNY)” mit dem Paul Scherrer Institut (PSI).

Precise, fast and durable in ultra-high vacuum

  • Vacuum: all ranges HV / UHV / EUV up to 10-11 mbar
  • Lubrication liquid up to10-8 / dryup to 10-11 mbar
  • Lifetime in kilometer range without liquid lubrication
  • Max. Bakeout temperature: 120°C
  • Available as magnetic version

Optionen:

  • Travels specifically adaptable to your application up to 510 x 80 x 80 mm
  • Without feedback as pure stepper motor system up to 5 µm repeatability
  • Outstanding standstill in the nanometer range due to additional piezo pincer brakes in Z and Y
  • Ball screw in Z and Y for higher speed and longer life with lubrication
  • Versions for clean room ISO 14644-1 class 4 (up to class 1 on request)

Individual extensions and customizations

Engineering services include the fitting of the systems to your structure and the desired controlls. Furthermore, we develop prototypes and like to adapt the systems to the environmental requirements of your application particle emission, radiation, temperature, precision special parts manufacturing, working height, collision protection, safety concept, compensation factor and filter, sensor mounting, brake, decoupling, special lubrication, special colors, holders, adapters, special motors with pharmaceutical approval, comprehensive documentation, test protocoll, llife cycle tests

Fields of application

Transport systems in ultra-high vacuum, vacuum applications with dry lubrication, transfer systems, vacuum fine adjustment, EUV lithography, beam shaping for exposure processes, surface analysis, sensor positioning, mass spectrometry, coating processes, coating thickness and coating rate measurements, basic research, laboratory technology, analytics

References

OMNY—A tOMography Nano crYo stage | Review of Scientific Instruments 89, 043706 (2018) | https://doi.org/10.1063/1.5020247

 

782475:001.26   X Y Z
Travel [mm] 510 40 80
  Repeatability unidirectional [µm] ± 0.4 ± 0.4 ± 0.4
  Repeatability bidirectional [µm] ± 0.5 ± 0.5 ± 0.5
  Positioning speed [mm/s] 50 4 4
  Max. load [N] 30 30 30
Feedback     Linear Scale   Linear Scale   Linear Scale
Motor     Stepper Motor   Stepper Motor   Stepper Motor
Guide   Cross roller stainless steel, hybrid
Length [mm] 706
Width [mm] 357
Height [mm] 260
Vacuum [mbar] up to 10-11  HV/UHV/EUV
Lubrication liquid [mbar] up to 10-8
Lubrication dry [mbar] up to  10-11
Max. bakeout temperature [deg] 120
Magnetism Versions   magnetic | low-magnetic | magnet-free

 

Used Standard Components

KGT 1412 / 1432

Flange single nut with 4-point-contact with internal ball return

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail