3LA170
Vacuum / Cleanroom Multi Axes Systems

782475:030.26
3LA170 - Vacuum / Cleanroom Multi Axes Systems

 

Heavy duty XYZ system (UHV)

Heavy duty three axes manipulator for loads up to 20 kg in vacuum. Dry running, piezo brake, lead screw, stepper motor. Includes measuring system for feedback of the actual position.

 

782475:030.26   X Y Z  
Standard System    LA170-060 LA170-130 LA200-100  
Travel [mm] 60 130 100  
Repeatability unidirectional [μm] ± 0.4 ± 0.4 ± 0.4  
Repeatability bidirectional [μm] ± 0.5 ± 0.5 ± 0.5  
Positioning speed [mm/s] 5 5 5  
Max. speed [mm/s] 10 10 10  
Max. load Fx [N] 196 196 196  
Length x Width x Heigt [mm]  405 x 280 x 365    
Lubrication liquid [mbar] up to 10-8      
Lubrication dry [mbar] up to 10-11      
Max. Bakeout temperature [deg] 120  
Drive   Lead Screw      
Motor   Stepper Motor  
Bearing   cross roller bearings stainless steel, hybrid  
Feedback   Linear Scale  
Resolution Measuring system 0.1 µm, optional 0.001 µm  
Optional features   with and without measuring system, lead screw with dry lube or ball screw with liquid lube, stabilization with piezo brake, custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs  
Variants clean room  up to clean room class ISO 6 (higher on request)
Variants beam   UV, DUV, EUV (X-ray, gamma on request)  
Variants magnetism magnetic      
Variants vacuum    all ranges up to 10E-11 mbar HV / UHV  

 

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

Overwiew standard stages   Contact technical consultants

 

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail