Coaxial rotary table with two rotation and longitudinal movement (UHV)
Vacuum / Cleanroom Multi Axes Systems
This rather exotic UHV-assembly combines two coaxial rotational axes which can be moved axially during motion. Driven by Nanomotion motors.
The assembly has been designed and manufactured for use in electron beam lithography equipment. The assembly is designed for an environment of 10-7 Torr (approx. 10-5 Pa). Suitable magnet-free materials were used to minimize permanent and electromagnetic influences on the ion beam.
201/5000 Even more axes for your vacuum applications
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Overwiew standard stages Contact technical consultants
Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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