Vacuum / Cleanroom Multi Axes Systems

Our repertoire includes complex EUV semiconductor systems, experimental systems and combinations of standard axes used as multi-axis manipulators. The systems shown here are examples of some possible ways of combining our cleanroom and vacuum-compatible stages.

XYZ Transfer Stage

XYZ Transfer Stage
Fast 3-axis UHV system LA80-2LA95 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load This...

YZ Tracking Stage

YZ Tracking Stage - Vacuum / Cleanroom Multi Axes Systems
YZ system with piezo brake (UHV) This 3-axis system is dry-running, has a piezo brake as well as a lead...

3LA170

3LA170
Heavy duty XYZ system (UHV) Heavy duty three axes manipulator for loads up to 20 kg in vacuum. Dry running,...

2LA95-LA105 (OSA)

2LA95-LA105 (OSA) - Vacuum / Cleanroom Multi Axes Systems
XYZ-System mit Piezobremse (UHV) Three coordinate manipulator with stroke of 5 x 20 x 10 mm and loads up to...

Camera Manipulator

Camera Manipulator (RICXS experiment)
Vacuum multi-axis system 1 Tesla at 10E-8 mbar (UHV), hard X-ray beam, 42 piezo motors RICXS experiment:...

XYZ Beam Aligner

XYZ Beam Aligner
UHV / DUV / EUV, cleanroom ISO 6, travel 5 x 10 x 5 mm, rep 0.2 µm, load 0.5 kg Cleanroom:...

sample manipulator

sample manipulator
In this system 12 piezo motors are working in pairs forming a six degree of freedom probe manipulator....

sample fixation (non

sample fixation (non magnetic, UHV)
In order to protect the delicate probe in its equally delicate probe holder this probe holder was designed....

LA97-MT85

LA97-MT85 - Vacuum / Cleanroom Multi Axes Systems
A three axes magnet free stage system. Strokes are at 200 mm for x and each 10 mm for y and z (vertical)....

linear stage with two

linear stage with two lifting stages
A robust PLT240 in vacuum preparation is carrying two lifting stages. All stages are driven by vacuum...

3LT300

3LT300 - Vacuum / Cleanroom Multi Axes Systems
XYZ manipulator Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry running...

Coaxial rotary table

Coaxial rotary table with two rotation and longitudinal movement (UHV) - Vacuum / Cleanroom Multi Axes Systems
This rather exotic UHV-assembly combines two coaxial rotational axes which can be moved axially during...

2PLT240-HT160

2PLT240-HT160
XYZ-System für Hochvakuum Vacuum system for up to 15 kg. Ball screw drives are used in XY and in the...

EUV adjuster

EUV adjuster
UHV mirror adjuster for Beamline This UHV positioning unit tilts into the beam by rope pulley driven from...

Angepasstes System für Ihr Gesamtkonzept

Your customized system

201/5000 Even more axes for your vacuum applications:

Even more axes for your vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
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Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
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