MT105-PM
Miniature Linear stages

Micro stage with cross roller bearings and Piezo LEGS® motor for demanding environments.

Micro stage with high dynamics and speed

The MT105 is a micro stage for universal use characterized by its high dynamics and speed. Compared to its size, it has a large travel and very small step sizes thanks to the piezo motor.

Flexible and universal

The MT105 is equipped with precision cross roller bearings. It is possible to equip this micro stage with two motors for positioning higher loads, as an option. And the stage can be effortlessly com bined into an XYZ system.

Optimum for demanding environments

Challenging environments in research and development often require optional special solutions. The MT105 micro stage is designed to achieve outstanding processing and positioning accuracy under extreme conditions such as in high vacuum, ultra-high vacuum and even for non-magnetic applications.

Specifications

Modell MT105		-30-2PM-L	-50-PM-L	-100-PM-L
Travel	[mm]	30	50	100
Repeatability unidirectional	[μm]	± 0.2	± 0.2	± 0.2
Repeatability bidirectional	[μm]	± 0.3	± 0.3	± 0.3
Accuracy	[μm]	± 1.2	± 1.4	± 1.9
Flatness	[μm]	± 1.5	± 2.5	± 5
Straightness	[μm]	± 1.1	± 1.8	± 3.5
Positioning speed	[mm/s]	5	5	5
Max. acceleration	[m/s²]	0.1	0.1	0.1
Max. load F_x	[N]	10	10	10
Max. load F_y	[N]	55	55	55
Max. load F_z	[N]	55	55	55
Max. torque M_x	[Nm]	2	2	2
Max. torque M_y	[Nm]	0.9	0.9	0.9
Max. torque M_z	[Nm]	0.7	0.7	0.7
Pitch	[µrad]	± 55	± 70	± 100
Yaw	[µrad]	± 35	± 40	± 60
Resolution	[µm]	0.1	0.1	0.1

Controllers

FMC400/450

Multi-axis controller fully ready for tracking, simple creation of own programs.

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

Data-sheet-micro-stage-MT105-positioning-technology-Steinmeyer-Mechatronik.pdf

STM_MT105-50-PM_xy-micro-stage_step-file.zip

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems Contact technical consultants