KT600-EDLM
XY Stages

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s
KT600-EDLM

 

Precision giant with the highest repeatability

This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems.Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm. An ironless electrodynamic linear motor ensures high dynamics. The motors in X and Y, which are matched to the different moving masses, ensure homogeneous dynamic behavior. The stages behaves the same in both axes.

Fastest scanning applications with high acceleration

  • Ideal for scanning applications or high-precision positioning
  • Extremely fast scan results by a positioning speed of 330 mm/s
  • Scan high loads with an extreme resolution of 0.05 µm
  • Cost-optimized to achieve the comparable performance of air bearing systems
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
 
  • Life expectancy up to two million full strokes
 
  • integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=2&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=c4c316b26eb0b4cb44f61988b6615122 title="Path that the positioning system can travel between the end switches that have just reset.">travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for <link en/competence-center-positioning-technology/glossary/detail/?tx_dpnglossary_glossarydetail%5Bcontroller%5D=Term&tx_dpnglossary_glossarydetail%5Baction%5D=show&tx_dpnglossary_glossarydetail%5Bterm%5D=24&tx_dpnglossary_glossarydetail%5BpageUid%5D=252&cHash=3a782fdd5c7438361ad171784d611232 title="Air bearings combine outstanding operating parameters in terms of flatness, waviness and straightness at the same time with high speeds and accelerations.">air bearing systems

 

 

Modell KT600-450-EDLM-L
Travel [mm] 450
Repeatability unidirectional [μm]± 0.2
Repeatability bidirectional [μm]± 0.3
Accuracy [μm]± 4.8
Flatness [μm]± 13
Straightness [μm]± 2.5
Positioning speed [mm/s]330
Max. speed [mm/s]500
Max. acceleration [m/s2]3
Max. load Fx [N]25
Max. load Fy [N]25
Max. load Fz [N]300
Max. torque Mx [Nm]32
Max. torque My [Nm]32
Max. torque Mz [Nm]30
Pitch [µrad]± 110
Yaw [µrad]± 110
Length [mm]600
Width [mm]600
Height [mm]110
MotorDynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
FeedbackLinearmesssystem, Linear Scale

 

Related Products


Almost all atmospheric standard stages are anodized with UHV lubrication for residual pressures up to 10-6 mbar and min. cleanroom class ISO 6 - or even better - available. Further stages for more demanding environments up to cleanroom class ISO 2, vacuum up to 10E-11 mbar or hard radiation you will find here:

 

Overview Clean Room & Vacuum XY Stages    Get in touch with our technical consultant

XY stages are basically high-precision positioning systems that are used to move objects in two dimensions (X and Y axes). They are used in a variety of applications, such as microscopy, manufacturing and automation technology. The architecture of our motorized XY systems can be categorized into four basic concepts:

  • Stacked stages (“Ritter Sport architecture”)
  • Crossed linear stages (“cross architecture”)
  • Inverted pyramid (“cone architecture”)
  • Pyramid (“pyramid architecture”)

Most XY stages are built according to the principle of the plate stack, sometimes also called “Ritter Sport architecture”. They have a particularly compact, square design and meet the expectations of a cross table.

However, they move apart during operation and then take up more space in two dimensions around the travel distance. The overhanging of the massive plates leads to bending, which reduces accuracy. As the design rules require the guides to be longer than the lateral distance, there is unused material on the sides of the individual travel directions. This causes the stage itself to be comparatively heavy, but it provides no benefit and merely causes the cross stage to bend additionally during travel. This results in a strong positional dependency of the bending and thus of the precision.

The cross architecture is easy to implement and is created by bolting linear motion stages together in a criss-cross pattern. Movement in one direction takes place across the center footprint. Space must be reserved accordingly in this direction. The advantage is that the plates are less bulky, reducing overhangs and thus bending and the impact on precision. As there is no material spilling over the sides of the crossed individual stages, there is less warping. The space gained can be used for cable routing for the upper axis. This results in less warping depending on the position and thus in greater precision.

Microscope stages are usually constructed as an inverted pyramid, resembling a “sugar cone” in shape. Compared to other architectures, this is particularly compact, flat and light. The drives can easily be hidden under the overhanging plates, which is particularly advantageous for mobile devices. This architecture is sufficient for applications in which the load is always applied in the center, for example in hardness testing stages. However, as with the plate stack architecture, the plates move apart and then take up additional space in two dimensions around the travel range. This means that the inverse pyramid has disadvantages comparable to those of the plate stack architecture.

The fourth architecture is the strict pyramid structure, which is characterized by its large appearance and thus does not meet the usual expectations of an XY Stage. The advantage of this solution is that the plates do not move apart during operation, so that the stage always takes up the same space. The flat support of the lower plate on the base structure forms a very rigid base for the entire system. In addition, there is no unused or overhanging material on the sides. The guide carriages always run completely on rails supported by metal and the guidance ratio is always maintained. In this way, the pyramid architecture is characterized by excellent accuracy values and extremely low deviations during movement and under different loads.

Steinmeyer Mechatronik GmbH mainly uses aluminum for the structure of XY Stages, as it provides the necessary flexural rigidity.

Optionally, various special materials and surface finishes are possible. Whether anodized, aluminum cleaned bare, bilatal or nickel for optimal process capability (e.g. particularly high degrees of purity, resistance to cleaning with chemicals in the field of life science), whether UV, DUV or EUV (X-ray, gamma on request). In special cases, titanium is also used for magnet-free systems.

Depending on the requirements, various drive systems can be used. This can be recognized as an abbreviation in the name below:

  • Ground ball screws or lead screws with SM (stepper motor), DC motor or AC servo.
  • Electrodynamic linear motors (ironless or iron-core).
  • Piezomotors such as Piezo-Legs® or Nanomotion®.

Incremental scales made of steel or Zerodur® or Zeromet® are used as a feedback system in most cases. While this is sufficient for accuracy in the single-digit micrometer range, it makes sense to use interferometric position feedback for accuracy requirements below one micrometer. In systems with “open loop”, i.e. without a measuring system, only precision in the double-digit micrometer range can be achieved; however, due to the simpler controller and the lack of a measuring system, this is the more cost-effective solution.

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Katja Weißbach
Consulting

T +49 351 88585-64
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Ronald Schulze
Consulting, Project Management & Engineering
T +49 351 88585-67
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Francisco Samuel
Consulting &
Project Management
T +49 351 88585-85
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Elger Matthes
Consulting, Concepts, Innovation & Engineering
T +49 351 88585-82
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