KT470-SM
XY Stages

High load XY stage (ball screw), travel 308 x 308 mm, rep ± 2.3 µm, load 23 kg, speed 40 mm/s

High loads with long travels

The KT470 XY stage with stepper motor is used in surface inspection. Low run-off with regard to straightness and flatness can be achieved by using cross rollers. This leads to an above-average repeatability, which is the basis for good compensation. This enables an extremely high accuracy for measuring applications.

Positioning of loads up to 230 N with an economical drive

Reduction of random errors to a minimum

very high reliability with minimal frictional resistance by using of lapped cross roller bearings

Options:

Available with DC or stepper motor
High-resolution measuring system
Configuration for cleanroom, laboratory or production
Customized development with 3D design, prototypes, series production

Cost-optimized and reliable positioning

Depending on customer requirements, the XY system is equipped with a stepper motor or DC motor. The DC motor is the first choice for applications with high speeds and low torques. If, on the other hand, the positioning task requires low power and low speeds, the stepper motor is the appropriate variant. The recommended load in the precision cycle is 10 kg, the maximum load is 30 kg.

Fields of application

Fast scanning applications and dynamic web travel e.g. semiconductor inspection, wafer inspection, chip testing, metrology systems, automatic optical inspection (AOI), measuring instruments, metrology, inspection systems, tool measurement

Specifications

KT470		-300-SM
Travel	[mm]	308 x 308
Repeatability unidirectional	[μm]	± 2.3
Repeatability bidirectional	[μm]	± 3.3
Accuracy	[μm]	± 18.9
Flatness	[μm]	± 7.5
Straightness	[μm]	± 3
Positioning speed	[mm/s]	20
Max. speed	[mm/s]	40
Max. acceleration	[m/s²]	0.4
Max. load Fx	[N]	44
Max. load Fy	[N]	44
Max. load Fz	[N]	227
Max. torque Mx	[Nm]	11
Max. torque My	[Nm]	11
Max. torque Mz	[Nm]	10
Pitch	[µrad]	± 170
Yaw	[µrad]	± 85
Length	[mm]	470
Width	[mm]	470
Height	[mm]	80
Weight	[kg]	36
Bearing		Cross Roller Bearings
Motor		Piezo Motor
Feedback		Linear Scale
Material		Anodized Aluminum
Optional features		available with high-resolution measuring system, nut decoupling, brake, anti-cage creep technology, custom adapter, bore grid, cable / plugs
Variants cleanroom		up to clean room class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants Magnetism		magnetic
Variants vacuum		up to 10E-11 mbar (higher in request)

Controllers

FMC 220

Versatile combinable controller, ideal for laboratory applications, control of 1 - 128 axes simultaneously

PLC

We support integration of our systems into PLC architectures, e.g. Beckhoff

Download

STM_KT470-DC-SM_xy-stage_interface.PDF

STM_KT470-300-DC_SM_xy-stage-step-file.zip

STM_KT470-300-DC-R-L_XY-stage_data-sheet.pdf

Solutions with KT470-SM

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Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!