KLT310-SM
XY Stages

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 1.6 µm, load 28 kg, speed 20 mm/s
KLT310-SM

High precision XY stage with high load rating

The XY stage combines two highly precise axes achieving outstanding values in accuracy. Its robust structure and travel of 100 mm in the X and Y directions means the KLT310 also enables highaccuracy positioning of heavy loads.
The values of the KLT310 correspond with the special requirements that are of major importance, particularly in measurement engineering.

Ideal for demanding measurement applications

  • High-precision positioning of loads up to 280 N
  • Accuracy values up to 1.6 µm due to high-precision spindle axes
  • Optional with stepper motor, DC motor and in different
    measuring system resolutions
  • Vacuum version available

Fields of application

Metrology, test engineering, surface inspection, inspection systems, inspection of heavy parts, laser processing, micro laser processing, photonics, tool measurement, microscopy

 

KLT310   -100-SM
Travel [mm] 100
Repeatability unidirectional [μm] ± 1.6
Repeatability bidirectional [μm] ± 2.1
Accuracy [μm] ± 10
Flatness [μm] ± 4
Straightness [μm] ± 3
Positioning speed [mm/s] 10
Max. speed [mm/s] 20
Max. acceleration [m/s2] 0.2
Max. load Fx [N] 45
Max. load Fy [N] 45
Max. load Fz [N] 280
Max. torque Mx [Nm] 6.1
Max. torque My [Nm] 6.1
Max. torque Mz [Nm] 5.6
Pitch [µrad] ± 150
Yaw [µrad] ± 100
Motor   Stepper Motor
Feedback   Open Loop

Related Products

1 KLT310-DC - XY Stages

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 0.3 µm, load 28 kg, speed 60 mm/s

1 KLT810-DLM - XY Stages

High performance XY stage (linear motor), travel 400 x 400 mm, rep ± 0.4 µm, load 100 kg, speed…

1 KDT310-SM - XY Stages

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 1.6 µm, load 7 kg, speed 20 mm/s

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

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