KDT600-EDLM
XY Stages
XY Aperture stage (linear motor), travel 385 x 385 mm, aperture 400 mm, rep 0.3 µm, load 23 kg, speed 500 mm/s
Scanning stage with large aperture
This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems. Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm.
With the large transmitted light, large substrates can also be measured from both sides or with fluoroscopy. It also offers the option of differential measurement to take advantage of full sensor accuracy in measurement applications. Even when the stage is fully moved, an opening of at least 60mm x 60mm is always kept.
Fastest scanning applications with high acceleration
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Fields of application
Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems
| KDT600-EDLM | -385-EDLM | |
| Travel | [mm] | 385 |
| Repeatability unidirectional | [μm] | ± 0.3 |
| Repeatability bidirectional | [μm] | ± 0.4 |
| Accuracy | [μm] | ± 16.6 |
| Flatness | [μm] | ± 10 |
| Straightness | [μm] | ± 1.7 |
| Positioning speed | [mm/s] | 330 |
| Max. speed | [mm/s] | 500 |
| Max. acceleration | [m/s2] | 3 |
| Max. load Fx | [N] | 25 |
| Max. load Fy | [N] | 25 |
| Max. load Fz | [N] | 230 |
| Max. torque Mx | [Nm] | 11 |
| Max. torque My | [Nm] | 11 |
| Max. torque Mz | [Nm] | 10 |
| Pitch | [µrad] | ± 280 |
| Yaw | [µrad] | ± 45 |
| Length | [mm] | 600 |
| Width | [mm] | 600 |
| Height | [mm] | 120 |
| Aperture | [mm] | 400 |
| Motor | Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor | |
| Feedback | Linearmesssystem, Linear Scale |
FMC 300
Installation module for dynamic applications and high loads and voltage.
FMC400/450
Multi-axis controller fully ready for tracking, simple creation of own programs.
FMC 250/280
Multi-axis controller with increased current and voltage for point-to-point positioning.
PLC
We support integration of our systems into PLC architectures, e.g. Beckhoff
Related Products
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
Are you looking for a technical solution for your application?
Get your first 3D Design in a few days:
Elger Matthes
Development, Consulting, Concepts, Innovation
| T +49 (0) 351 88585-82 |
Francisco Samuel
Consulting &
Project Management
| T +49 (0) 351 88585-85 |
Ronald Schulze
Consulting, Project Management & Engineering
| T +49 (0) 351 88585-67 |
Our references