KDT600-EDLM
XY Stages

XY Aperture stage (linear motor), travel 385 x 385 mm, aperture 400 mm, rep 0.3 µm, load 23 kg, speed 500 mm/s
KDT600-EDLM

Scanning stage with large aperture

This large precision xy stage is designed for maximum repeatability. Accuracy can be achieved with compensation in a cost-saving manner, which is otherwise only reserved for air bearing systems. Polished cross roller guides are used for repeatability of straightness and flatness of + -0.15 µm.

With the large transmitted light, large substrates can also be measured from both sides or with fluoroscopy. It also offers the option of differential measurement to take advantage of full sensor accuracy in measurement applications. Even when the stage is fully moved, an opening of at least 60mm x 60mm is always kept.

Fastest scanning applications with high acceleration

  • Extremely fast scan results by a positioning speed of 330 mm/s
  • Scan high loads with an extreme resolution of 0.05 µm
  • Cost-optimized to achieve the comparable performance of air bearing systems
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
 
  • Life expectancy up to two million full strokes
 
  • integrated cable management, plug-in terminal

Fields of application

Fast scanning applications and dynamic web travel e.g. semiconductor inspection, measuring systems, automatic optical inspection (AOI), measuring devices, differential measurement, replacement for air bearing systems

 

KDT600-EDLM   -385-EDLM
Travel [mm] 385
Repeatability unidirectional [μm] ± 0.3
Repeatability bidirectional [μm] ± 0.4
Accuracy [μm] ± 16.6
Flatness [μm] ± 10
Straightness [μm] ± 1.7
Positioning speed [mm/s] 330
Max. speed [mm/s] 500
Max. acceleration [m/s2] 3
Max. load Fx [N] 25
Max. load Fy [N] 25
Max. load Fz [N] 230
Max. torque Mx [Nm] 11
Max. torque My [Nm] 11
Max. torque Mz [Nm] 10
Pitch [µrad] ± 280
Yaw [µrad] ± 45
Length [mm] 600
Width [mm] 600
Height [mm] 120
Aperture [mm] 400
Motor   Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
Feedback   Linearmesssystem, Linear Scale

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Angepasstes System für Ihr Gesamtkonzept

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Designs for cleanroom, beam and vacuum

Almost all atmospheric standard systems are anodized with UHV lubrication for residual pressures up to 10E-6 mbar and min. cleanroom class ISO 6 - or even better - available.

Overwiew cleanroom & vacuum systems       Contact technical consultants

 

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