XY Stages

Our high precision XY stages are universal in use and their operating parameters correspond with the most important requirements in metrology and test engineering.

KLT810-DLM

High performance XY stage (linear motor), travel 400 x 400 mm, rep ± 0.4 µm, load 100 kg, speed…

KDT600-EDLM

XY Aperture stage (linear motor), travel 385 x 385 mm, aperture 400 mm, rep 0.3 µm, load 23 kg,…

KT600-EDLM

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s

KT510-SM

High load XY stage (ball screw), travel 200 x 200 mm, rep ± 1.3 µm, load 30 kg, speed 40 mm/s

KT500-EDLM

Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s

KT470-DC

High load XY stage (ball screw), travel 300 x 300 mm, rep ± 0.5 µm, load 23 kg, speed 100 mm/s

KT470-SM

High load XY stage (ball screw), travel 308 x 308 mm, rep ± 2.3 µm, load 23 kg, speed 40 mm/s

KT405-EDLM

Performance XY stage (linear motor), travel 320 x 320 mm, rep ± 0.3 µm, load 10 kg, speed 150 mm/s

KDT380-DC

XY stage (ball screw), travel 155 x 155 mm, aperture 170 mm, rep ± 0.5 µm, load 11 kg, speed 50…

KDT310-DC

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 0.5 µm, load 7 kg, speed 60 mm/s

KDT310-SM

XY stage (ball screw), travel 100 x 100 mm, aperture 150 mm, rep ± 1.6 µm, load 7 kg, speed 20 mm/s

KLT310-DC

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 0.3 µm, load 28 kg, speed 60 mm/s

KLT310-SM

High load XY stage (ball screw), travel 100 x 100 mm, rep ± 1.6 µm, load 28 kg, speed 20 mm/s

KT310-DC

XY stage (ball screw), travel 200 x 200 mm, rep ± 0.7 µm, load 11 kg, speed 60 mm/s

KT310-SM

XY stage (ball screw), travel 200 x 200 mm, rep ± 2.3 µm, load 11 kg, speed 20 mm/s

KT305-EDLM

Performance XY stage (linear motor), travel 210 x 210 mm, rep ± 0.3 µm, load 8 kg, speed 225 mm/s

2PLT240-DLM

High performance XY stage (linear motor), travel 300 - 750 mm, rep ± 0.4 µm, load 49 kg, speed 1185…

KDT235-DC

XY microscopy stage (ball screw), travel 50 x 50 mm, aperture 100 mm, rep ± 0.5 µm, load 8 kg,…

KDT235-SM

XY microscopy stage (ball screw), travel 50 x 50 mm, aperture 100, rep ± 1.6 µm, load 8 kg, speed…

KT230-EDLM

Performance XY stage (linear motor), travel 110 x 110 mm, rep ± 0.3 µm, load 5 kg, speed 300 mm/s

KDT180-NM

High-precision XY piezo stage, travel 100 x 100 mm, aperture 115 mm, rep ± 0.5 µm, load 5 kg, speed…

KDT180-PM

High-precision XY piezo stage, travel 100 x 100 mm, aperture 115 mm, rep ± 0.3 µm, load 5 kg, speed…

KDT180-DC

XY Scanning stage (ball screw), travel 50 x 50 mm, aperture 90 mm, rep ± 2.3 µm, load 5 kg, speed 3…

KDT180-SM

XY Scanning stage (ball screw), travel 50 x 50 mm, aperture 90 mm, rep ± 2.3 µm, load 5 kg, speed 3…

KT180-DC

XY microscopy stage (ball screw), travel 50 x 50 mm, rep ± 0.5 µm, load 6 kg, speed 5 mm/s

KT180-SM

XY microscopy stage (ball screw), travel 50 x 50 mm, rep ± 1.2 µm, load 6 kg, speed 3 mm/s

2PLT165-DLM

High performance XY stage (linear motor), travel 500 x 400 mm, rep ± 0.4 µm, load 52 kg, speed 870…

KDT105-PM

XY piezo scanning stage, travel 50 x 50 mm, aperture 50 mm, rep ± 0.3 µm, load 5 kg, speed 7.5 mm/s

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Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!