LA340-EDLM
Linear Axes

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090 mm/s
LA340-EDLM

Highly dynamic linear stage with air bearing

The drive concept of this linear axis is based on a dynamic linear motor and a linear measuring system, whereby it provides excellent flatness and straightness for highly dynamic applications. The granite structure with air bearings provides particle-free operation and a particularly long lifetime.

  • Ideal for particle-free, highly dynamic applications with high precision
  • Perfect flatness and high repeatibility up to ± 0.3 µm
  • Highly dynamic at speeds of up to 2060 mm/s
  • High load up to 50 kg
  • Suitable for maintenance-free 3-shift operation in clean room

Options:

  • Travels from 500 - 2000 mm
  • Versions for clean room, laboratory or production
  • Optionally with base plate and frame
  • Different measuring system resolutions up to 0.001 µm
  • Customized development with 3D design, prototypes, large series production

Fields of application

linear stage for precision scanning, setup of dynamic and highly precise multi-axis systems for cleanroom applications, semiconductor technology: wafer inspection, measurement of large substrates, TFT / OLED inspection, semiconductor printers for applying coating components, biotechnology: laboratory diagnostics, image-based inline monitoring, high-speed microscopy, laboratory automation

 

LA340-EDLM   -500-EDLM-L -1000-EDLM-L -1500-EDLM-L -2000-EDLM-L
Travel [mm] 500 1000 1500 2000
Repeatability unidirectional [μm] ± 0.3 ± 0.3 ± 0.3 ± 0.3
Repeatability bidirectional [μm] ± 0.4 ± 0.4 ± 0.4 ± 0.4
Accuracy [μm] ± 1.9 ± 3 ± 4.1 ± 5.2
Flatness [μm] ± 0.8 ± 1.5 ± 2.3 ± 3
Straightness [μm] ± 0.8 ± 1.5 ± 2.3 ± 3
Positioning speed [mm/s] 790 1210 1630 2060
Max. speed [mm/s] 1185 1815 2445 3090
Max. acceleration [m/s2] 16 25 35 40
Max. load Fx [N] 100 100 100 100
Max. load Fy [N] 500 500 500 500
Max. load Fz [N] 500 500 500 500
Max. torque Mx [Nm] 30 30 30 30
Max. torque My [Nm] 50 50 50 50
Max. torque Mz [Nm] 30 30 30 30
Pitch [µrad] ± 11 ± 16 ± 19 ± 20
Yaw [µrad] ± 11 ± 16 ± 19 ± 20
Length [mm] 1060 1560 2060 2560
Width [mm] 379 379 379 379
Height [mm] 310 310 310 310
Weight [kg] 370
Weight with frame [kg] 640
Bearing   Air Bearing
Type of drive system Linear Motor
Motor   Ironless Dynamic Linear Motor
Feedback   Linear Scale
Measuring system resolutions    0.05 µm (optionally up to 0.001 µm)
Material   Anodized Aluminum, Granite
Optional features   Frame
Variants cleanroom  up to clean room class ISO 6 (higher on request)
Variants beam   UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism on request
Variants vacuum    on request

Related Products

1 LA250-DLM - Linear Axes

High load stage (linear motor), travel up to 2000 mm, rep ± 0.4 µm, load up to 25 kg, Speed up to…

1 PLT165-DLM - Linear Stages

High performance stage (linear motor), travel 200 - 750 mm, rep ± 0.4 µm, load 6 kg, speed 1155…

1 PLT240-DLM - Linear Stages

High performance stage (linear motor), travel 200 - 1000 mm, rep 0.4 µm, load 15 kg, speed 1815…

1 PLT320-DLM - Linear Stages

Heavy duty linear stage (linear motor), travel 300 - 1500 mm, rep ± 0.4 µm, load 25 kg, speed 2445…

1 KT230-EDLM - XY Stages

Performance XY stage (linear motor), travel 110 x 110 mm, rep ± 0.3 µm, load 5 kg, speed 300 mm/s

1 KT305-EDLM - XY Stages

Performance XY stage (linear motor), travel 210 x 210 mm, rep ± 0.3 µm, load 8 kg, speed 225 mm/s

1 KT405-EDLM - XY Stages

Performance XY stage (linear motor), travel 320 x 320 mm, rep ± 0.3 µm, load 10 kg, speed 150 mm/s

1 PMT160-EDLM - Linear Stages

High precision linear stage (linear motor), travel 50 - 260 mm, rep ± 0.3 µm, load 1,4 kg, speed…

1 LA340-EDLM - Linear Axes

High performance stage (air bearing), travel 500 - 2000 mm, rep ± 0.3 µm, load 10 kg, speed 3090…

1 LA110-EDLM - Linear Axes

High performance stage (linear motor), travel 250 - 750 mm, rep ± 0.4 µm, load 4.5 kg, speed 1500…

1 KDT600-EDLM - XY Stages

XY Aperture stage (linear motor), travel 385 x 385 mm, aperture 400 mm, rep 0.3 µm, load 23 kg,…

1 KT500-EDLM - XY Stages

Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s

1 KT600-EDLM - XY Stages

High load XY stage (linear motor), travel 450 x 450 mm, rep ± 0.2 µm, load 30 kg, speed 500 mm/s

1 KLT810-DLM - XY Stages

High performance XY stage (linear motor), travel 400 x 400 mm, rep ± 0.4 µm, load 100 kg, speed…

1 2PLT240-DLM - XY Stages

High performance XY stage (linear motor), travel 300 - 750 mm, rep ± 0.4 µm, load 49 kg, speed 1185…

1 2PLT165-DLM - XY Stages

High performance XY stage (linear motor), travel 500 x 400 mm, rep ± 0.4 µm, load 52 kg, speed 870…

Angepasstes System für Ihr Gesamtkonzept

Your customized system

Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

Are you looking for a technical solution for your application?

Get your first 3D Design in a few days:

 

Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
E-Mail

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
E-Mail

Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
E-mail

Our references