KT500-EDLM
XY Stages

Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s
KT500-EDLM

Flat, precise and fast

The KT500 not only impresses with its very flat and compact design. Thanks to 350 mm travel, even large substrates and parts can be scanned over the entire surface. It is designed in such a way that all process parameters can be exactly repeated and a comparable performance of air bearing systems is achieved. Thanks to a cable interface that can be disconnected via a plug connection, simple installation and maintenance-free operation up to 500,000 full strokes is possible.

Highly dynamic XY system with long lifetime

  • High-precision repeatability up to 0.3 µm
  • Time savings in start-stop operation by top speeds of up to 400 mm/s and an acceleration of 1G
  • Maintenance-free operation up to 500,000 full strokes, afterwards only a simple relubrication is necessary
  • Life expectancy up to two million full strokes
  • Available with up to two electrodynamic linear motors per direction: 2+2 motors for particularly fast scan results, 2+1 motors for equal dynamics

Fields of application

Fast scanning applications and dynamic trajectory e.g. semiconductor inspection, metrology equipment, automatic optical inspection (AOI), measuring equipment, differential measurement, replacement for air bearing stages

 

KT500   -350-EDLM-L
Travel [mm] 350
Repeatability unidirectional [μm] ± 0.3
Repeatability bidirectional [μm] ± 0.4
Accuracy [μm] ± 10
Flatness [μm] ± 10
Straightness [μm] ± 5
Positioning speed [mm/s] 200
Max. speed [mm/s] 300
Max. acceleration [m/s2] 1000
Max. load Fx [N] 25
Max. load Fy [N] 25
Max. load Fz [N] 100
Max. torque Mx [Nm] 11
Max. torque My [Nm] 11
Max. torque Mz [Nm] 11
Pitch [µrad] ± 190
Yaw [µrad] ± 95
Length [mm] 500
Width [mm] 500
Height [mm] 90
Motor   Dynamischer Linearmotor (eisenlos), Ironless Dynamic Linear Motor
Feedback   Linearmesssystem, Linear Scale

Related Products

1 KT500-EDLM - XY Stages

Performance XY stage (linear motor), travel 350 x 350 mm, rep ± 0.3 µm, load 10 kg, speed 300 mm/s

1 KT405-EDLM - XY Stages

Performance XY stage (linear motor), travel 320 x 320 mm, rep ± 0.3 µm, load 10 kg, speed 150 mm/s

1 KT305-EDLM - XY Stages

Performance XY stage (linear motor), travel 210 x 210 mm, rep ± 0.3 µm, load 8 kg, speed 225 mm/s

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Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!

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Elger Matthes
Development, Consulting, Concepts, Innovation

T +49 (0) 351 88585-82
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Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85
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Ronald Schulze
Consulting, Project Management & Engineering

T +49 (0) 351 88585-67
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