KDT180-SM
XY Stages

XY Scanning stage (ball screw), travel 50 x 50 mm, aperture 90 mm, rep ± 2.3 µm, load 5 kg, speed 3 mm/s

Symmetrical XY stage in plate architecture with aperture

The KDT180 is a universally applicable stage, which convinces with its extremely flat design and the large aperture of 90 x 90 mm. The aperture enables differential measurements excluding residual errors of the stage or transmitted light measurements. This stage is therefore particularly suitable for metrology and optical applications.

Compact and flat with large aperture

Ideal for microscopy, inspection and measuring systems

Precise repeatability up to 2.3 µm

Optional as DC motor or stepper motor version

Fields of application

Applications in microscopy, metrology, optics, 3D imaging, autofocus systems, electronics assembly, optics positioning, sample positioning, semiconductor inspection, measurement systems, measuring equipment

Specifications

Modell KDT180-SM		-50-SM
Travel	[mm]	50
Repeatability unidirectional	[μm]	± 2.3
Repeatability bidirectional	[μm]	± 3.3
Accuracy	[μm]	± 14.3
Flatness	[μm]	± 4.8
Straightness	[μm]	± 3.6
Positioning speed	[mm/s]	1.4
Max. speed	[mm/s]	3
Max. acceleration	[m/s²]	0.4
Max. load Fx	[N]	5.3
Max. load Fy	[N]	5.3
Max. load Fz	[N]	55
Max. torque Mx	[Nm]	0.9
Max. torque My	[Nm]	0.9
Max. torque Mz	[Nm]	0.7
Pitch	[µrad]	± 120
Yaw	[µrad]	± 75
Weight	[kg]	2.5
Length	[mm]	180
Width	[mm]	180
Height	[mm]	38
Aperture	[mm]	90 x 90
Motor		Stepper Motor
Feedback		Open Loop