DT155-NM
Rotary Stages

High-resolution rotary stage, unlimited travel, rep up to 0.0003°, speed up to 300°/s, load up to 0.5 kg

Highly precise with dynamic imaging

Compact and outstanding flat (200 x 155 x 35 mm)

Repeatability up to ± 0.0003°

Large aperture of 79 mm / 3“

Options:

Version for cleanroom, vacuum and beam
Combinable with the XY Aperture Stage KDT180-NM
Customized development with 3D design, prototypes, series production

Fields of application

High-precision and dynamic microscopy, e.g. electron microscope, ion microscope, scanning electron microscope, wafer handling, wafer inspection, semiconductor quality control, semiconductor research

Specifications

DT155		-NM
Travel	[deg]	n x 360
Repeatability unidirectional	[deg]	± 0.0003
Repeatability bidirectional	[deg]	± 0.0005
Positioning speed	[deg/s]	200
Max. speed	[deg/s]	300
Max. load Fx	[N]	49
Length	[mm]	200
Width	[mm]	155
Height	[mm]	35
Weight	[kg]	1.7
Turntable	[mm]	Ø 150
Aperture	[mm]	Ø 79 (3")
Motor		Nanomotion (Piezo)
Bearing		2 Thin-section bearings
Feedback		Angular Scale
Resolution Measuring system		0.00005°
Optional features		custom adapter, bore grid, cable / plugs, combination with Steinmeyer standard XY stages, linear axes, lifting stages
Variants cleanroom		up to cleanroom class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism		magnetic, low-magnetic (magnet-free on request)
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV

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Stages for cleanroom and vacuum applications

Even more stage for your clean room and vacuum applications?

Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!