DT155-NM
Rotary Stages

High-resolution rotary stage (Piezo Motor), travel n x 360° mm, aperture ⌀ 79 mm / 3“, rep ± 0.0003°, load 4.9 kg, speed 200°/s

Highly precise with dynamic imaging

Compact and outstanding flat (200 x 155 x 35 mm)

Repeatability up to ± 0.0003°

Large aperture of 79 mm / 3“

Options:

Version for cleanroom, vacuum and beam
Combinable with the XY Aperture Stage KDT180-NM
Customized development with 3D design, prototypes, series production

Fields of application

High-precision and dynamic microscopy, e.g. electron microscope, ion microscope, scanning electron microscope, wafer handling, wafer inspection, semiconductor quality control, semiconductor research

Specifications

DT155		-NM
Travel	[deg]	n x 360
Repeatability unidirectional	[deg]	± 0.0003
Repeatability bidirectional	[deg]	± 0.0005
Positioning speed	[deg/s]	200
Max. speed	[deg/s]	300
Max. load Fx	[N]	49
Length	[mm]	200
Width	[mm]	155
Height	[mm]	35
Weight	[kg]	1.7
Turntable	[mm]	Ø 150
Aperture	[mm]	Ø 79 (3")
Motor		Nanomotion (Piezo)
Bearing		2 Thin-section bearings
Feedback		Angular Scale
Resolution Measuring system		0.00005°
Optional features		custom adapter, bore grid, cable / plugs, combination with Steinmeyer standard XY stages, linear axes, lifting stages
Variants cleanroom		up to cleanroom class ISO 6 (higher on request)
Variants beam		UV, DUV, EUV (X-ray, gamma on request)
Variants magnetism		magnetic, low-magnetic (magnet-free on request)
Variants vacuum		all ranges up to 10E-11 mbar HV / UHV